Opposing electrode light modulator array and method for manufacturing the same

• US 6,396,618 B1
• Filed: 04/11/2000
• Issued: 05/28/2002
• Est. Priority Date: 11/03/1999
• Status: Expired due to Fees

• Current Assignee: CREO Company Limited
• Original Assignee: Creoscitex Corporation Limited (Creo Products Incorporated), Regents of the University of California (University of California)
• Inventors: Ronen, Yossi, Esener, Sadik
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): O'Neill, Gary
• Application Number:
  US09/547,305
• Time in Patent Office: 777 Days
• Field of Search: 359/247,315,316,321,322,323,254 385/1,2,3,4 65/385 438/51,129
• US Class Current: 359/254
• CPC Class Codes: G02F 1/0316 Electrodes
• CPC Class Codes: G02F 1/0322 Arrangements comprising two or more independently controlled crystals
• CPC Class Codes: G02F 1/0551 Constructional details

Abstract

An improved linear light modulator array is formed with opposing electrodes which extend away from the optic surfaces of optoelcctronic material used to form the array. A uniform electric field is created across a modulator volume, generally perpendicular to light propagation within the modulator volume. The modulator volume of an element in the array is a function of electrode length, width and separation. Additional elements are defined by additional pairs of electrodes. The geometry is obtained by cutting optoelectronic material into strips. Cut sides of the strips are metallized, one at a time, with the opposite side temporarily affixed to a carrier. Aligned trenches are cut in the metallized strips to separate electrode pairs and define array elements.

Claims

1. A light modulator linear array of multiple modulator elements comprising:

electrooptic material having opposing optical surfaces; and

a plurality of spaced apart pairs of opposing electrodes, each pair of opposing electrodes being disposed along at least a portion of opposing electrode surfaces extending between said opposing optical surfaces, each pair of opposing electrodes defining one of the multiple modulator elements within the light modulation material.

2. The light modulator linear array according to claim 1, wherein each said pair of opposing electrodes extends substantially an entire length between said opposing optical surfaces.

3. The light modulator linear array according to claim 2, wherein the length between said opposing optical surfaces defines an interaction length and each said pair of opposing electrodes, when stimulated, creates a electric field perpendicular to said interaction length.

4. The light modulator linear array according to claim 1, wherein the length between said opposing optical surfaces defines an interaction length and each said pair of opposing electrodes, when stimulated, creates a electric field perpendicular to said interaction length.

5. The light modulator linear array according to claim 1, wherein a modulating volume of an element in the linear array is a function of the length, width and separation of its corresponding pair of opposing electrodes.

6. The light modulator linear array according to claim 1, wherein separation between adjacent ones of said pairs of opposing electrodes is from about 15 to 25 microns.

7. The light modulator linear array according to claim 1, further comprising a light guide coating on said opposing optical surfaces.

8. A method for manufacturing a light modulator linear array from a wafer of electrooptic material, the method comprising steps of:

cutting the wafer through its width to form at least one strip of electrooptic material;

temporarily affixing a cut side of said at least one strip to a carrier;

forming metal onto an opposite cut side of said at least one strip;

forming trenches to separate deposited metal into discrete electrodes;

repeating said steps of temporarily affixing, forming metal, and forming trenches to form opposing discrete electrodes and define discrete modulator elements thereby completing a linear array.

9. The method according to claim 8, wherein said wafer is coated with light guide material prior to said step of cutting.

10. A light modulator linear array of multiple modulator elements comprising:

electrooptic material having opposing optical surfaces; and

a plurality of spaced apart registered pairs of opposing electrodes, each pair of opposing electrodes being disposed along at least a portion of opposing electrode surfaces extending between and perpendicular to said opposing optical surfaces, each pair of opposing electrodes defining one of the multiple modulator elements within the light modulation material.