Deflectable spatial light modulator having stopping mechanisms
First Claim
1. A micro-electromechanical device comprising:
- a substrate having a first surface;
a support structure coupled to said first surface of said optically transmissive substrate; and
a reflective element deflectably coupled to said substrate via said support structure, wherein said support structure comprises a stopping mechanism constructed for resisting deflection of said reflective element beyond a pre-determined tilt angle.
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Accused Products
Abstract
A spatial light modulator having one or more deflection limiting mechanisms and process for fabrication therefor. In one embodiment, the mirror support structure has rigid deflection stoppers that limit the tilt angle of the reflective plate. The mirror support structure may also include an attraction electrode that is attached to the back-side of the reflective plate such that the reflective plate may be selectively actuated by electrostatic force. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.
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Citations
66 Claims
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1. A micro-electromechanical device comprising:
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a substrate having a first surface;
a support structure coupled to said first surface of said optically transmissive substrate; and
a reflective element deflectably coupled to said substrate via said support structure, wherein said support structure comprises a stopping mechanism constructed for resisting deflection of said reflective element beyond a pre-determined tilt angle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A spatial light modulator comprising:
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a first substrate having a first surface;
a deflectable element deflectably coupled to the first surface of the first substrate;
a second substrate positioned across from and spaced apart from said first surface of said first substrate, said second substrate comprising electronic circuitry adapted for causing said deflectable element to deflect; and
a primary stopping mechanism and a secondary stopping mechanism, each for stopping deflection of the deflectable element when deflected by the electronic circuitry, the primary stopping mechanism and the secondary stopping mechanism each positioned so as to stop deflection of the deflectable element when the deflectable element deflects and then abuts against the primary and secondary stopping mechanisms. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A spatial light modulator, comprising:
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a first substrate;
a deflectable element held on the first substrate via a hinge and stop assembly, the hinge connected to the deflectable element so as to allow the deflectable element to pivot around an axis, and the stop positioned to arrest the pivoting of the deflectable element. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A spatial light modulator comprising:
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a first substrate;
a deflectable element pivotably held on the first substrate;
a post or wall extending from the first substrate and having a lip or protrusion which extends past a portion of the deflectable element such that when the deflectable element pivots, a portion of the deflectable element abuts against the lip or protrusion so as to stop the movement of the deflectable element. - View Dependent Claims (49, 50, 51, 54, 57)
50.The spatial light modulator of claim 49, wherein the first substrate is glass, quartz or sapphire. -
50. The spatial light modulator of claim 48, wherein the deflectable element is a conductive and substantially rigid mirror element.
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51. The spatial light modulator of claim 48, wherein the deflectable element comprises first and second portions such that when the deflectable element pivots, the second portion moves towards the first substrate as the first portion moves away from the first substrate.
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54. The spatial light modulator of claim 48, further comprising a hinge that extends across a portion of the deflectable element for allowing pivoting movement of the deflectable element.
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57. The spatial light modulator of claim 48, further comprising a second silicon substrate with addressing circuitry and an electrode for electrostatically attracting the deflectable element.
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52. The spatial light modulator of claim 52, wherein the first portion concurrently moves away from the first substrate and toward the lip or protrusion of the post or wall and an area of the first portion constructed to abut against the lip or protrusion so as to stop the pivoting movement of the deflectable element.
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53. The spatial light modulator of claim 53, wherein the second portion is constructed so as to be capable of abutting against the first substrate.
- 55. The spatial light modulator of claim 55, wherein the hinge connects to the post or wall.
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58. A spatial light modulator comprising in cross section:
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an optically transmissive substrate;
a first gap disposed below the optically transmissive substrate;
a pivotable mirror disposed below the first gap;
a second gap disposed below the mirror; and
a deflection stopper disposed below the second gap.
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- 59. The spatial light modulator of claim 59, further comprising a connector that connects the pivotable mirror with the optically transmissive substrate.
- 60. The spatial light modulator of claim 60, wherein said connector comprises said deflection stopper.
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65. The spatial light modulator of claim 65, wherein said second substrate comprises addressing circuitry and an electrode for electrostatically causing the mirror to pivot.
Specification