Electrostatically actuated electromagnetic radiation shutter
First Claim
1. An electromagnetic radiation shutter driven by electrostatic forces, comprising:
- a stationary membrane capable of allowing electromagnetic radiation transmission therethrough;
a first flexible membrane comprising an electrode element and at least one biasing element, wherein the first flexible membrane includes a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane; and
a second flexible membrane comprising an electrode element and at least one biasing element, wherein the second flexible membrane includes a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane, whereby a voltage differential established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane moves said first and second flexible membranes relative to said stationary membrane to thereby deflect electromagnetic radiation.
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Accused Products
Abstract
An electromagnetic radiation shutter device driven by electrostatic forces comprises a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, and a first and second flexible membrane comprising an electrode element and at least one biasing element. The first flexible membrane has a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane. The second flexible membrane has a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane. In operation, a voltage differential is established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane thereby moving the first and second flexible membranes relative to the stationary membrane. In a closed state (i.e. fully activated), the flexible membranes will be generally parallel to the stationary membrane and will be capable of deflecting electromagnetic radiation. In an open state (i.e. no voltage applied), the flexible membranes will generally be fully curled based on biasing in the flexible membranes induced during fabrication and/or imparted by material characteristics.
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Citations
34 Claims
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1. An electromagnetic radiation shutter driven by electrostatic forces, comprising:
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a stationary membrane capable of allowing electromagnetic radiation transmission therethrough;
a first flexible membrane comprising an electrode element and at least one biasing element, wherein the first flexible membrane includes a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane; and
a second flexible membrane comprising an electrode element and at least one biasing element, wherein the second flexible membrane includes a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane, whereby a voltage differential established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane moves said first and second flexible membranes relative to said stationary membrane to thereby deflect electromagnetic radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An electromagnetic radiation shutter array comprising more than one electromagnetic radiation shutter driven by electrostatic forces, the shutters including:
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a stationary membrane capable of allowing electromagnetic radiation transmission therethrough;
a first flexible membrane comprising an electrode element and at least one biasing element, wherein the first flexible membrane includes a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane; and
a second flexible membrane comprising an electrode element and at least one biasing element, wherein the second flexible membrane includes a fixed portion attached to the topside of die stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane, whereby a voltage differential established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane moves said first and second flexible membranes relative to said stationary membrane to thereby deflect electromagnetic radiation. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A method for shuttering electromagnetic radiation in a device driven by electrostatic forces, the method comprising:
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providing for a electromagnetic radiation shutter having a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, a first flexible membrane attached to the underside of the stationary membrane and comprising an electrode element and at least one biasing element, and a second flexible membrane attached to the topside of the flexible membrane and comprising an electrode element and at least one biasing element;
transmitting electromagnetic radiation through the stationary membrane;
applying electrostatic voltage across the electrode element of the first flexible membrane and the electrode element of the second flexible membrane;
moving the first and second flexible membranes, in response to the application of voltage, from an open state in which the membranes are generally curled to a closed state in which the membranes are generally parallel with the stationary membrane; and
deflecting the electromagnetic radiation at the flexible membranes positioned in the closed state. - View Dependent Claims (28, 29)
removing the electrostatic voltage applied across the electrode elements of the first and second flexible membranes;
moving the first and second flexible membranes, in response to the removal of voltage, from a closed state in which the membranes are generally parallel with the stationary membrane to an open state in which the membranes are generally curled; and
transmitting electromagnetic radiation through the stationary membrane.
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29. The method of claim 27, wherein transmitting electromagnetic radiation further comprises transmitting RF electromagnetic radiation and deflecting electromagnetic radiation further comprises deflecting RF electromagnetic radiation.
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30. A method for fabricating an electromagnetic radiation shutter driven by electrostatic forces, the method comprising the steps of
providing for a substrate; -
disposing a first release layer on the substrate;
forming a first flexible membrane on the first release layer;
disposing a second release layer on the first flexible membrane;
forming a stationary membrane on the second release layer, the first flexible membrane and a frame structure;
disposing a third release layer on the stationary membrane;
forming a second flexible membrane on the third release layer and the stationary membrane; and
removing the first, second and third release layers to allow for a distal portion of the flexible membranes to be released from the stationary membrane. - View Dependent Claims (31, 32, 33, 34)
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Specification