Electrostatically actuated electromagnetic radiation shutter

• US 6,396,620 B1
• Filed: 10/30/2000
• Issued: 05/28/2002
• Est. Priority Date: 10/30/2000
• Status: Expired due to Term

• Current Assignee: Micross Advanced Interconnect Technology LLC
• Original Assignee: MCNC, Inc.
• Inventors: Goodwin-Johansson, Scott H.
• Primary Examiner(s): Ben, Loha
• Assistant Examiner(s): HINDI, OMAR Z
• Application Number:
  US09/702,082
• Time in Patent Office: 575 Days
• Field of Search: 359/278,292,291,871,231,230,245,249,279,227 438/14,667,626
• US Class Current: 359/292
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B81C 2201/056 Releasing structures at the end of the manufacturing process
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means

Abstract

An electromagnetic radiation shutter device driven by electrostatic forces comprises a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, and a first and second flexible membrane comprising an electrode element and at least one biasing element. The first flexible membrane has a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane. The second flexible membrane has a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane. In operation, a voltage differential is established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane thereby moving the first and second flexible membranes relative to the stationary membrane. In a closed state (i.e. fully activated), the flexible membranes will be generally parallel to the stationary membrane and will be capable of deflecting electromagnetic radiation. In an open state (i.e. no voltage applied), the flexible membranes will generally be fully curled based on biasing in the flexible membranes induced during fabrication and/or imparted by material characteristics.

Claims

1. An electromagnetic radiation shutter driven by electrostatic forces, comprising:

a stationary membrane capable of allowing electromagnetic radiation transmission therethrough;

a first flexible membrane comprising an electrode element and at least one biasing element, wherein the first flexible membrane includes a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane; and

a second flexible membrane comprising an electrode element and at least one biasing element, wherein the second flexible membrane includes a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane,

whereby a voltage differential established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane moves said first and second flexible membranes relative to said stationary membrane to thereby deflect electromagnetic radiation.

2. The electromagnetic radiation shutter of claim 1, further comprising a frame structure that serves to support the stationary membrane and allow for unobstructed movement of the flexible membranes.

3. The electromagnetic radiation shutter of claim 2, wherein the frame structure comprises a substrate.

4. The electromagnetic radiation shutter of claim 1, wherein the first flexible and second flexible membranes each comprise two biasing elements.

5. The electromagnetic radiation shutter of claim 4, wherein the first and second flexible membranes comprise an electrode element intermediate a first and second biasing element.

6. The electromagnetic radiation shutter of claim 1, wherein the biasing element provides for electrical insulation between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane.

7. The electromagnetic radiation shutter of claim 1, wherein the stationary membrane comprises a non-conductive dielectric material.

8. The electromagnetic radiation shutter of claim 1, wherein the at least one biasing element comprises a polymeric material.

9. The electromagnetic radiation shutter of claim 1, wherein the at least one biasing element has a higher coefficient of expansion than the electrode element.

10. The electromagnetic radiation shutter of claim 1, wherein the first and second flexible membranes are positionally biased so as to remain in a generally fully curled position absent electrostatic force.

11. The electromagnetic radiation shutter of claim 1 wherein the electrode elements of the first and second flexible membranes comprise gold.

12. The electromagnetic radiation shutter of claim 11, further comprising at least one adhesion-promoting element disposed adjacent to the electrode element to promote adhesion between the electrode element and subsequent elements of the flexible membrane.

13. The electromagnetic radiation shutter of claim 12, wherein the at least one adhesion promoting element comprises chromium.

14. The electromagnetic radiation shutter of claim 1, wherein the electrode elements of the first and second flexible membranes have a predetermined plan view shape that minimizes the voltage required to activate the shutter.

15. The electromagnetic radiation shutter of claim 1, wherein the electrode elements of the first and second flexible membranes have a generally rectangular plan view shape.

16. The electromagnetic radiation shutter of claim 1, wherein the electrode elements of the first and second flexible membranes are tapered in plan view shape such that the width of the electrode elements decreases as the distance from the fixed portion of the flexible membranes increases.

17. The electromagnetic radiation shutter of claim 1, wherein the composite thickness of the electrode elements of the first and second flexible membranes is greater than about 5 times the skin depth of the RF radiation being shuttered.

18. The electromagnetic radiation shutter of claim 1, wherein the biasing element comprises a non-oxidation based insulator material.

19. The electromagnetic radiation shutter of claim 1, wherein the shutter deflects radio frequency (RF) electromagnetic radiation.

20. The electromagnetic radiation shutter of claim 1, wherein the electromagnetic radiation shutter is a microelectromechanical system (MEMS) device.

21. An electromagnetic radiation shutter array comprising more than one electromagnetic radiation shutter driven by electrostatic forces, the shutters including:

a stationary membrane capable of allowing electromagnetic radiation transmission therethrough;

a first flexible membrane comprising an electrode element and at least one biasing element, wherein the first flexible membrane includes a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane; and

a second flexible membrane comprising an electrode element and at least one biasing element, wherein the second flexible membrane includes a fixed portion attached to the topside of die stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane,

whereby a voltage differential established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane moves said first and second flexible membranes relative to said stationary membrane to thereby deflect electromagnetic radiation.

22. The array of claim 21, wherein the first and second flexible membranes of the shutters comprise an electrode element intermediate a first and second biasing element.

23. The array of claim 21, wherein the first and second flexible membranes of the shutters are positionally biased so as to remain in a generally fully curled position absent electrostatic force.

24. The array of claim 21, wherein the electrode elements of the first and second flexible membranes have a predetermined plan view shape that minimizes the voltage required to activate the shutter.

25. The array of claim 21, wherein the shutters deflect radio frequency (RF) electromagnetic radiation.

26. The array of claim 21, wherein the electromagnetic radiation shutters arc microelectromechanical system (MEMS) devices.

27. A method for shuttering electromagnetic radiation in a device driven by electrostatic forces, the method comprising:

providing for a electromagnetic radiation shutter having a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, a first flexible membrane attached to the underside of the stationary membrane and comprising an electrode element and at least one biasing element, and a second flexible membrane attached to the topside of the flexible membrane and comprising an electrode element and at least one biasing element;

transmitting electromagnetic radiation through the stationary membrane;

applying electrostatic voltage across the electrode element of the first flexible membrane and the electrode element of the second flexible membrane;

moving the first and second flexible membranes, in response to the application of voltage, from an open state in which the membranes are generally curled to a closed state in which the membranes are generally parallel with the stationary membrane; and

deflecting the electromagnetic radiation at the flexible membranes positioned in the closed state.

28. The method of claim 27, further comprising:

removing the electrostatic voltage applied across the electrode elements of the first and second flexible membranes;

moving the first and second flexible membranes, in response to the removal of voltage, from a closed state in which the membranes are generally parallel with the stationary membrane to an open state in which the membranes are generally curled; and

transmitting electromagnetic radiation through the stationary membrane.

29. The method of claim 27, wherein transmitting electromagnetic radiation further comprises transmitting RF electromagnetic radiation and deflecting electromagnetic radiation further comprises deflecting RF electromagnetic radiation.

30. A method for fabricating an electromagnetic radiation shutter driven by electrostatic forces, the method comprising the steps of

providing for a substrate;

disposing a first release layer on the substrate;

forming a first flexible membrane on the first release layer;

disposing a second release layer on the first flexible membrane;

forming a stationary membrane on the second release layer, the first flexible membrane and a frame structure;

disposing a third release layer on the stationary membrane;

forming a second flexible membrane on the third release layer and the stationary membrane; and

removing the first, second and third release layers to allow for a distal portion of the flexible membranes to be released from the stationary membrane.

31. The method of claim 30, wherein forming a first flexible membrane on the first release layer further comprises disposing a first biasing layer on the first release layer, disposing a first electrode layer on the first biasing layer and disposing a second biasing layer on the electrode layer.

32. The method of claim 30, wherein disposing a second release layer further comprises patterning a second release layer region on the first flexible membrane to allow for the first flexible membrane to form a fixed portion with the stationary membrane.

33. The method of claim 30, wherein disposing a third release layer further comprises patterning a third release layer region on the stationary membrane to allow for the second flexible membrane to form a fixed portion with the stationary membrane.

34. The method of claim 30, wherein forming a second flexible membrane further comprises disposing a third biasing layer on the third release layer and stationary membrane, disposing a second electrode layer on the third biasing layer and disposing a fourth biasing layer on the second electrode layer.