MEMS optical cross-connect switch
First Claim
1. A MEMS optical cross-connect switch comprising:
- a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface;
a rotational magnetic field source disposed proximate the first microelectronic substrate that actuates the pop-up mirror; and
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least one positioning structure for positioning said pop-up mirror in a reflective state.
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Accused Products
Abstract
A microelectromechanical structure capable of switching optical signals from an input fiber to one of two or more output fibers. In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a rotational magnetic field source, such as a variably controlled magnetic field source. The rotational magnetic field source allows for reliable actuation of the pop-up mirror from a non-reflective state to a reflective state. Additionally the invention is embodied in a MEMS optical cross-connect switch having a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a positioning structure disposed in a fixed positional relationship relative to the first substrate. The positioning structure may comprise a positioning structure extending from a second microelectronic substrate that is in a fixed positional relationship relative to the first microelectronic substrate. The positioning structure serves to restrict further movement of the pop-up mirror when the pop-up mirror has been actuated into a reflective state.
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Citations
99 Claims
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1. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface;
a rotational magnetic field source disposed proximate the first microelectronic substrate that actuates the pop-up mirror; and
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least one positioning structure for positioning said pop-up mirror in a reflective state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface; and
a rotational magnetic field source disposed proximate the first microelectronic substrate that actuates the pop-up mirror, wherein said pop-up mirror further comprises at least one or more materials capable of optical reflectivity and magnetic activity.
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26. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface; and
a rotational magnetic field source disposed proximate the first microelectronic substrate that actuates the pop-up mirror, wherein said pop-up mirror further comprises an outlying frame portion attached about the periphery of said pop-up mirror.
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27. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface and that rotates from a non-reflective state to a reflective state; and
a positioning structure disposed in a fixed positional relationship relative to the first microelectronic substrate, wherein said positioning structure engages said pop-up mirror upon rotation of said pop-up mirror to the reflective state, wherein said positioning structure further comprises a positioning structure extending from a second microelectronic substrate, wherein the second microelectronic substrate is disposed in a fixed positional relationship relative to the first microelectronic substrate. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface and that rotates from a non-reflective state to a reflective state;
a positioning structure disposed in a fixed positional relationship relative to the first microelectronic substrate, wherein said positioning structure engages said pop-up mirror upon rotation of said pop-up mirror to the reflective state; and
a plurality of magnetic field sources wherein said plurality of magnetic field sources further comprises a first and a second magnetic field source. - View Dependent Claims (45, 46, 47)
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48. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface and that rotates from a non-reflective state to a reflective state; and
a positioning structure disposed in a fixed positional relationship relative to the first microelectronic substrate, wherein said positioning structure engages said pop-up mirror upon rotation of said pop-up mirror to the reflective state, wherein said pop-up mirror further comprises at least one or more materials capable of optical reflectivity and magnetic activity.
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49. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having a first surface;
a pop-up mirror disposed on the first surface and that rotates from a non-reflective state to a reflective state; and
a positioning structure disposed in a fixed positional relationship relative to the first microelectronic substrate, wherein said positioning structure engages said pop-up mirror upon rotation of said pop-up mirror to the reflective state, wherein said pop-up mirror further comprises a frame portion attached along the periphery of said pop-up mirror. - View Dependent Claims (50)
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51. A MEMS optical cross-connect switch comprising:
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a first microelectronic substrate having, a first surface, a magnetically active pop-up mirror disposed on the first surface wherein said pop-up mirror remains in a position generally parallel to the first surface of said first microelectronic substrate when electrostatic voltage is applied to said pop-up mirror, a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least two positioning structures extending from said second microelectronic substrate toward the first surface of said first microelectronic substrate, wherein said at least two positioning structures serve to restrict further movement of said pop-up mirror and electrostatically clamp said pop-up mirror in a stationary position when the pop-up mirror has been activated to allow for optical signal reflection, and a magnetic field source disposed about said first and second microelectronic substrate such that a magnetic field may be activated to propel said pop-up mirror into a position that allows for the pop-up mirror to be electrostatically clamped to the at least two positioning structures. - View Dependent Claims (52, 53)
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54. A MEMS optical cross-connect switch array comprising:
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a first microelectronic substrate having a first surface;
at least two pop-up mirrors disposed on the first surface of the first microelectronic substrate;
a rotational magnetic field source disposed proximate the first microelectronic substrate; and
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least two positioning structures for positioning said pop-up mirror in a reflective state. - View Dependent Claims (55, 56, 57, 58)
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59. A MEMS optical cross-connect switch array comprising
a first microelectronic substrate having a first surface; -
at least two pop-up mirrors disposed on the first surface of the first microelectronic substrate; and
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least two positioning structures extending from said second microelectronic substrate toward the first surface of said first microelectronic substrate, wherein said at least two positioning structures serve to restrict further movement of said at least two pop-up mirrors when the pop-up mirrors have been activated to allow for optical signal reflection. - View Dependent Claims (60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72)
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73. A MEMS optical cross-connect switch array comprising:
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a first microelectronic substrate having a first surface, at least two pop-up mirrors disposed on the first surface of the first microelectronic substrate;
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, a magnetic field source that provides for a magnetic field oriented with respect to the said first microelectronic substrate to interact with said at least two pop-up mirrors; and
at least two magnetic pole pieces disposed proximate to said second microelectronic substrate, wherein the at least two magnetic pole pieces provide for further magnetic attraction of the pop-up mirror. - View Dependent Claims (74)
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75. A MEMS optical cross-connect switching system comprising:
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a first microelectronic substrate having a first surface;
at least one optical fiber input disposed about the perimeter of the first microelectronic substrate;
at least two optical fiber outputs disposed about the perimeter of the first microelectronic chip;
at least one pop-up mirror disposed on the first surface;
a rotational magnetic field source disposed proximate the first microelectronic substrate, wherein the rotational magnetic field source actuates the at least one pop-up mirror from a non-reflective to non-reflective state; and
a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least one positioning structure extending from said second microelectronic substrate toward the first surface of said first microelectronic substrate, wherein said at least one positioning structure serves to restrict further movement of said at least one pop-up mirror when the at least one pop-up mirror has been activated to allow for optical signal reflection. - View Dependent Claims (76, 77, 78, 79)
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80. A MEMS optical cross-connect switching system comprising:
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a first microelectronic substrate having a first surface at least one optical fiber input disposed about the perimeter of the first microelectronic chip;
at least two optical fiber outputs disposed about the perimeter of the first microelectronic chip;
at least one pop-up mirror disposed on the first surface, and a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least one positioning structure extending from said second microelectronic substrate toward the first surface of said first microelectronic substrate, wherein said at least one positioning structure serves to restrict further movement of said at least one pop-up mirror when the at least one pop-up mirror has been activated to allow for optical signal reflection. - View Dependent Claims (81, 82, 83, 84)
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85. A MEMS optical switch comprising:
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a microelectronic substrate;
a pop-up mirror disposed on a surface of the microelectronic substrate and configured to rotate between first and second angular positions with respect to the surface of the substrate;
a rotational magnetic field source disposed proximate the microelectronic substrate that rotates the pop-up mirror between the first and second angular positions; and
a positioning structure having a surface that contacts the pop-up mirror as the pop-up mirror is rotated to the second position. - View Dependent Claims (86, 87, 88, 89, 90, 91, 92, 93)
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94. A method for cross-connect switching of optical signals in a microelectronic device, the method comprising the steps of:
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receiving an input signal on an optical path;
generating a rotational magnetic field to actuate a pop-up mirror from a non-reflective state to a reflective state;
reflecting the input signal off the pop-up mirror on another optical path;
maintaining position of the pop-up mirror at the reflective state; and
restricting the actuation of the pop-up mirror with at least one positioning structure extending from a second microelectronic substrate toward the first microelectronic substrate. - View Dependent Claims (95, 96)
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97. A method for making an optical cross connect switch, the method comprising the steps of:
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disposing at least one pop-up mirror on the surface of a first microelectronic substrate, defining at least one positioning structure within a second microelectronic substrate; and
positioning the first microelectronic substrate in a fixed relationship with the second microelectronic substrate such that the at least one positioning structure of the second microelectronic substrate serves to impede further actuation of the at least one pop-up mirror beyond the reflective state. - View Dependent Claims (98, 99)
etching anisotropically at least one opening in the second microelectronic substrate that will define a precision facing of the at least one positioning structure, creating an oxide barrier in the at least one opening to protect the precision facing of the at least one positioning structure, performing a deep reactive ion etch to define the remaining structure of the at least one positioning structure;
removing the oxide barrier in the at least one opening, and re-oxidizing the second microelectronic substrate.
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Specification