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MEMS optical cross-connect switch

  • US 6,396,975 B1
  • Filed: 01/21/2000
  • Issued: 05/28/2002
  • Est. Priority Date: 01/21/2000
  • Status: Expired due to Term
First Claim
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1. A MEMS optical cross-connect switch comprising:

  • a first microelectronic substrate having a first surface;

    a pop-up mirror disposed on the first surface;

    a rotational magnetic field source disposed proximate the first microelectronic substrate that actuates the pop-up mirror; and

    a second microelectronic substrate disposed in a fixed positional relationship relative to said first microelectronic substrate, said second microelectronic substrate having at least one positioning structure for positioning said pop-up mirror in a reflective state.

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