Materials transport system having inductive power transfer

• US 6,397,990 B1
• Filed: 04/28/1999
• Issued: 06/04/2002
• Est. Priority Date: 10/20/1998
• Status: Expired due to Term

• Current Assignee: Kevin Schuele, Murata Machinery Limited (Muratec)
• Original Assignee: PRI Automation, Inc. (Azenta, Inc.)
• Inventors: Weiss, Mitchell, Brien, Richard M.
• Primary Examiner(s): Morano, S. Joseph
• Assistant Examiner(s): Jules, Frantz F.
• Application Number:
  US09/300,947
• Time in Patent Office: 1,133 Days
• Field of Search: 104/88.04, 104/118, 104/292, 104/290, 198/619, 191/10
• US Class Current: 191/10
• CPC Class Codes: H01L 21/67706 Mechanical details, e.g. roller, belt H01L21/67709 takes precedence
• CPC Class Codes: H01L 21/67709 using magnetic elements
• CPC Class Codes: H01L 21/67724 by means of a cart or a vehicule

Abstract

An inductive power transfer apparatus is provided which is especially useful for a semiconductor wafer handling system or other similar type of materials transport system in which one or more cars are moveable along a track. The system includes a plurality of elongated primary coils each disposed at an intended position along the track. Each of the moveable cars has one or more pick-up or secondary coils which are coupled to the primary coil when the car comes into position along the track. A secondary coil or coils on the car provides power to a battery charging circuit for so long as the secondary is in coupling relationship with the primary or for so long as needed to provide an intended charge to the on board batteries. A drive circuit for the primary coil may be located near the primary coil or alternatively, a single drive circuit can be at a central location to provide drive signals to a plurality of primary coils. The drive circuit can be activated by sensing the presence of a secondary coil in coupling position with the primary coil. The charge current can be controlled to suit the characteristics or charge status of the batteries.

Claims

1. An inductive power transfer apparatus for coupling electrical energy between a first position along a travel path and a unit which is moveable along the travel path, the apparatus comprising:

an elongated primary coil disposed at a first position along the travel path and having an unobstructed coupling path;

the unit moveable along the travel path, the unit having a secondary coil which when in the first position is in coupling relationship with the elongated primary coil at the unobstructed coupling path and the unit having an on-board rechargeable energy source directly electrically connected to a charging circuit, the charging circuit further coupled to the secondary coil, the on-board rechargeable energy source directly electrically connected to a motor, to provide the power thereto, wherein the motor is operative to move the unit along the travel path to provide the power thereto;

a drive circuit operative in response to DC power to provide drive signals to the primary coil to induce a charging current in the secondary coil when the secondary coil is coupled to the primary coil; and

the secondary coil being operative to provide the charging current to the charging circuit in response to energy provided by the primary coil when in coupling relationship with the secondary coil, wherein the charging circuit charges the on-board rechargeable energy source in response to the charging current.

2. For use in a semiconductor wafer transport system having a track disposed along a predetermined path and one or more cars moveable along the track for movement of wafers to successive work stations and wherein each of the cars has at least one battery powered motor thereon for propulsion of the car along the track and for powering on-board circuitry on the car, an inductive power transfer apparatus for coupling electrical power from one or more positions along the track to the one or more cars, said apparatus comprising:

a primary coil disposed at each of one or more positions along a travel path;

the car moveable along the travel path, the car having a secondary coil which when in the one or more positions is in coupling relationship with the primary coil and the car having a battery source directly electrically connected to a charging circuit, the charging circuit coupled to the secondary coil, the battery source directly electrically connected to the battery powered motor to provide power thereto;

a drive circuit operative in response to DC power to provide drive signals to the one or more primary coils to induce a charging current in the secondary coil when coupled to the primary coil; and

the secondary coil being operative to provide the charging current to the charging circuit in response to energy provided by the primary coil when in coupling relationship with the secondary coil, wherein the battery source is charged by the charging circuit in response to the charging current.

3. The apparatus of claim 2 wherein the primary coil has first and second long sides disposed parallel to the travel path and first and second ends which are disposed rearwardly of the travel path to provide an unobstructed coupling path for the secondary coil.

4. The apparatus of claim 3 wherein the primary coil is composed of multiple turns of insulated wire sufficient to provide an intended electromagnetic field in response to the drive signals.

5. The apparatus of claim 4 including a support for mounting the primary coil in predetermined position along the travel path.

6. The apparatus of claim 5 wherein the support for the primary coil is made of a non-conductive material.

7. The apparatus of claim 5 wherein the support for the primary coil is made of a magnetic material.

8. The apparatus of claim 3 wherein the secondary coil is wound on a leg of a shaped transformer core, the secondary coil and associated leg being sized to move in coupling relationship along the unobstructed coupling path of the primary coil.

9. The apparatus of claim 8 wherein the primary coil is wound on a leg of a transformer core.

10. The apparatus of claim 8 wherein the secondary coil is wound on a center leg of an E-shaped transformer core.

11. The apparatus of claim 8 wherein the transformer core of the secondary coil is made of a ferrite material.

12. The apparatus of claim 2 further including activation apparatus operative to activate the drive circuit when the primary coil is in coupling relationship with the secondary coil.

13. The apparatus of claim 12 wherein the activation apparatus includes a detector operative to sense the coupling position of the primary and secondary coils.

14. The apparatus of claim 13 wherein the detector is an opto interrupter.

15. The apparatus of claim 12 wherein the drive circuit is inactive except when activated by the primary and secondary coils being in coupling relationship as determined by an activation signal from the detector.

16. The apparatus of claim 2 wherein the battery charging circuit includes a circuit for control of the charging characteristics of the charging current.

17. The apparatus of claim 2 wherein the drive circuit is powered from a DC source and wherein the drive signals are drive pulses.

18. The apparatus of claim 2 further including feedback control circuitry operative to monitor the charge on the one or more batteries and to control the charging process.

19. The apparatus of claim 2 wherein each of the cars has a front and rear truck with wheels for engagement of the track and wherein each of the cars has a battery powered motor for each truck and a secondary coil for charging each battery powered motor.

20. The apparatus of claim 2 wherein each car includes circuitry operative to maintain battery charge status and to provide data to control the rate of charging appropriate to the charge status.

21. The apparatus of claim 2 wherein the drive signals are pulses having a rate effective to induce the intended charging current in the secondary coil.

22. The apparatus of claim 2 wherein the battery source includes a plurality of batteries.

23. The apparatus of claim 2 wherein the secondary coil is wound on the center leg of an E shaped transformer core and wherein the long sides of the primary coil are disposed in the gaps of the E shaped transformer core.

24. The apparatus of claim 2 wherein the drive circuit provides drive signals to a plurality of the primary coils.

25. The apparatus of claim 2 including a secondary circuit connected to the secondary coil and having a power conditioner receiving signals from the secondary coil induced from pulses provided to the primary coil, the power conditioner operative to provide the charging current to the battery source.

26. The apparatus of claim 2 wherein the drive signals are drive pulses.