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Plasma reactor and shields generating self-ionized plasma for sputtering

  • US 6,398,929 B1
  • Filed: 10/08/1999
  • Issued: 06/04/2002
  • Est. Priority Date: 10/08/1999
  • Status: Expired due to Fees
First Claim
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1. A pair of shields for use in a plasma sputtering reactor, comprising a first generally circularly symmetric shield and a second generally circularly symmetric shield both referenceable to a common axis:

  • wherein said first shield comprises a first flange portion extending radially outwardly from said axis;

    a first cylindrical portion extending along said axis for a first length, having a first diameter, and being connected to said first flange portion, a second cylindrical portion extending along said axis for a second length, and having a second diameter smaller than said first diameter, a first transition portion connecting said first and second cylindrical portions, a bowl portion connected to said second cylindrical portion and extending radially of said axis, and a third cylindrical portion extending along said axis for a third length smaller than said second length, having a third diameter smaller than said second diameter, and being connected to said bowl portion;

    wherein said second shield comprises a second flange portion extending radially outwardly from said axis, a fourth cylindrical portion extending along said axis for a fourth length larger than said first length and having a fourth diameter smaller than said first diameter, a fifth cylindrical portion extending along said axis for a fifth length smaller than said second length and having a fifth diameter smaller than said second diameter and larger than said third diameter, and a second transition portion connecting said fourth and fifth cylindrical portions; and

    wherein said first and second shields are positionable along said axis to form a convolute channel between (a) said first and fourth cylindrical portions, (b) said first and second transition portions, and (c) said second and fifth cylindrical portions.

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