Method for fabricating semiconductor light emitting element

• US 6,399,409 B2
• Filed: 04/23/2001
• Issued: 06/04/2002
• Est. Priority Date: 01/29/1997
• Status: Expired due to Term

• Current Assignee: Xiamen San'An Optoelectronics Co.Ltd. (Sanan Optoelectronics Company Limited)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Nakamura, Junichi, Sasaki, Kazuaki
• Primary Examiner(s): Fourson, George
• Assistant Examiner(s): COLEMAN, WILLIAM D
• Application Number:
  US09/839,114
• Publication Number:
  US 20010016366A1
• Time in Patent Office: 407 Days
• Field of Search: 257/91, 257/94, 257/96, 438/483, 438/46, 438/47, 438/518, 438/590, 438/604, 438/605, 438/779, 372/45
• US Class Current: 438/46
• CPC Class Codes: H01L 33/0066 with a substrate not being a III-V compound
• CPC Class Codes: H01L 33/14 with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table

Abstract

The semiconductor light emitting element of the present invention includes: a compound semiconductor substrate having a first conductivity type; a light emitting layer; a compound semiconductor interface layer having a second conductivity type and not containing Al; and a current diffusion layer having the second conductivity type and being made of a compound semiconductor not containing Al.

Claims

1. A method for fabricating a semiconductor light emitting element, wherein the semiconductor light emitting element includes:

a compound semiconductor substrate having a first conductivity type;

a light emitting layer;

a compound semiconductor interface layer having a second conductivity type and not containing Al; and

a current diffusion layer having the second conductivity type and being made of the same compound semiconductor material as that of the compound semiconductor interface layer,

and the method comprises the steps of;

forming the light emitting layer and the compound semiconductor interface layer on the compound semiconductor substrate; and

forming the current diffusion layer over the compound semiconductor interface layer,

wherein a growth process is suspended at a predetermined time so that a re-growth interface is located on a surface of the compound semiconductor interface layer.

2. A method according to claim 1, further comprising:

forming a current constriction layer between the compound semiconductor interface layer and the current diffusion layer.

5. A method according to claim 2, further comprising:

forming an electrode layer on the current diffusion layer,

wherein an opening in the electrode layer is aligned with an opening in the current constriction layer.

6. A method according to claim 1, further comprising:

forming an electrode layer on the current diffusion layer.

8. A method according to claim 1, wherein the light emitting layer has a double heterostructure in which an AlGaInP or AlInP cladding layer having the first conductivity type, an AlGaInP or GaInP active layer, and an AlGaInP or AlInP cladding layer having the second conductivity type are sequentially formed in this order.

9. A method according to claim 1, wherein a thickness of the compound semiconductor interface layer is equal to or smaller than about 3.0 micrometers.

10. A method according to claim 1, wherein the compound semiconductor interface layer has a carrier concentration in a range from about 2×

10¹⁶ cm<sup>−

3</sup> to about 2×

10¹⁸ cm<sup>−

3</sup>, and the current diffusion layer has a carrier concentration of about 2×

10¹⁸ cm<sup>−

3</sup> or more.

3. A method for fabricating a semiconductor light emitting element, wherein the semiconductor light emitting element includes:

a compound semiconductor substrate having a first conductivity type;

a light emitting layer;

a compound semiconductor interface layer having a second conductivity type and not containing Al; and

a current diffusion layer having the second conductivity type and being made of a compound semiconductor not containing Al,

and the method comprises the steps of;

forming the light emitting layer and the compound semiconductor interface layer on the compound semiconductor substrate; and

forming the current diffusion layer over the compound semiconductor interface layer,

wherein a growth process is suspended at a predetermined time so that a re-growth interface is located on a surface of the compound semiconductor interface layer, and

wherein the current constriction layer has the first conductivity type and is formed of a compound semiconductor not containing Al.

4. A method for fabricating a semiconductor light emitting element, wherein the semiconductor light emitting element includes:

a compound semiconductor substrate having a first conductivity type;

a light emitting layer;

a compound semiconductor interface layer having a second conductivity type and not containing Al; and

a current diffusion layer having the second conductivity type and being made of a compound semiconductor not containing Al,

and the method comprises the steps of;

forming the light emitting layer and the compound semiconductor interface layer on the compound semiconductor substrate; and

forming the current diffusion layer over the compound semiconductor interface layer,

wherein a growth process is suspended at a predetermined time so that a re-growth interface is located on a surface of the compound semiconductor interface layer, and

wherein the compound semiconductor interface layer, the current constriction layer and the current diffusion layer are made of the same compound semiconductor material.

7. A method for fabricating a semiconductor light emitting element, wherein the semiconductor light emitting element includes;

a compound semiconductor substrate having a first conductivity type;

a light emitting layer;

a compound semiconductor interface layer having a second conductivity type and not containing Al; and

a current diffusion layer having the second conductivity type and being made of a compound semiconductor not containing Al,

and the method comprises the steps of;

forming the light emitting layer and the compound semiconductor interface layer on the compound semiconductor substrate; and

forming the current diffusion layer over the compound semiconductor interface layer,

wherein a growth process is suspended at a predetermined time so that a re-growth interface is located on a surface of the compound semiconductor interface layer, and

wherein a carrier concentration of the current diffusion layer increases from a region thereof over the compound semiconductor interface layer toward a region thereof under the electrode layer.