Radiation hardened silicon-on-insulator (SOI) transistor having a body contact
First Claim
1. A field effect transistor comprising:
- a dielectric layer disposed on a substrate; and
a transistor structure disposed on said dielectric layer, wherein said transistor structure includes;
a body region formed on a first surface portion of said dielectric layer;
a source region formed on a second surface portion of said dielectric layer contiguous with said first surface portion;
a drain region formed on a third surface portion of said dielectric layer contiguous with said first surface portion;
a gate layer overlying said body region and being operative to induce a channel region in said body region disposed between and adjoining said source region and said drain region; and
a plurality of heavily doped diffusion regions placed across two opposite edges of said source region, wherein said plurality of heavily doped diffusion regions have a higher impurity concentration than said body region, and said plurality of heavily doped diffusion regions are extended into said channel region and ohmically connected to said channel region.
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Accused Products
Abstract
A radiation hardened silicon-on-insulator transistor is disclosed. A dielectric layer is disposed on a substrate, and a transistor structure is disposed on the dielectric layer. The transistor structure includes a body region, a source region, a drain region, and a gate layer. The body region is formed on a first surface portion of the dielectric layer, the source region is formed on a second surface portion of the dielectric layer contiguous with the first surface portion, the drain region is formed on a third surface portion of the dielectric layer contiguous with the first surface portion, and the gate layer overlies the body region and being operative to induce a channel in that portion of the body region disposed between and adjoining the source region and the drain region. In addition, multiple diffusions are placed across two edges of the source region. These diffusions are ohmically connected to the body region via a body contact, and these diffusions are also connected to the source region by a self-aligned salicide.
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Citations
6 Claims
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1. A field effect transistor comprising:
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a dielectric layer disposed on a substrate; and
a transistor structure disposed on said dielectric layer, wherein said transistor structure includes;
a body region formed on a first surface portion of said dielectric layer;
a source region formed on a second surface portion of said dielectric layer contiguous with said first surface portion;
a drain region formed on a third surface portion of said dielectric layer contiguous with said first surface portion;
a gate layer overlying said body region and being operative to induce a channel region in said body region disposed between and adjoining said source region and said drain region; and
a plurality of heavily doped diffusion regions placed across two opposite edges of said source region, wherein said plurality of heavily doped diffusion regions have a higher impurity concentration than said body region, and said plurality of heavily doped diffusion regions are extended into said channel region and ohmically connected to said channel region. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification