Tunable Fabry-Perot filters and lasers

• US 6,400,738 B1
• Filed: 04/14/2000
• Issued: 06/04/2002
• Est. Priority Date: 04/14/2000
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Sorin, Wayne V., Tucker, Rodney S.
• Primary Examiner(s): Ip, Paul
• Assistant Examiner(s): MONBLEAU, DAVIENNE N
• Application Number:
  US09/550,547
• Time in Patent Office: 781 Days
• Field of Search: 372/92, 372/98, 372/99, 372/107, 372/108, 372/20, 372/28, 356/352, 359/378, 359/379, 359/291, 359/292, 359/223, 359/224, 359/260
• US Class Current: 372/20
• CPC Class Codes: G02B 7/1822 comprising means for aligning the optical axis G02B7/1821 takes precedence
• CPC Class Codes: H01S 3/08059 Constructional details of the reflector, e.g. shape mirrors in general G02B5/08; mountings for mirrors G02B7/18
• CPC Class Codes: H01S 3/105 by controlling the mutual position or the reflecting properties of the reflectors of the cavity , e.g. by controlling the cavity lengthH01S3/10076, H01S3/13 take precedence
• CPC Class Codes: H01S 5/18366 Membrane DBR, i.e. a movable DBR on top of the VCSEL
• CPC Class Codes: H01S 5/18388 Lenses

Abstract

A tunable optical cavity constructed from a fixed mirror and a movable mirror. The fixed mirror is attached to a substrate having a first electrically conducting surface. A support member having the moveable mirror supported thereon and having a second electrically conducting surface, is suspended above the substrate. A circuit applies an electrical potential between the first and second electrically conducting surfaces thereby adjusting the distance between the fixed and movable mirrors. The fixed mirror and the moveable mirror are positioned such that the mirrors form the opposite ends of the optical cavity. The distance between the fixed mirror and the moveable mirror is a function of the applied electrical potential. The fixed mirror is mounted in a well in the substrate such that distance between the support member and the substrate is less than half the distance between the mirrors.

Claims

1. A tunable optical cavity having a resonant wavelength selectable in a range about a predetermined wavelength, said cavity comprising:

a fixed mirror attached to a substrate having a first electrically conducting surface;

a support member having a moveable mirror supported thereon, said support member having a second electrically conducting surface, said support member being suspended above said substrate; and

a circuit for applying an electrical potential between said first and second electrically conducting surfaces,

wherein said fixed mirror is located in a well in said substrate such that the distance between said support member and said substrate is less than half the distance between said mirrors and wherein said fixed mirror and said moveable mirror are positioned such that said mirrors form the opposite ends of said optical cavity, wherein the distance between said fixed mirror and said moveable mirror is a function of said applied electrical potential.

2. The optical cavity of claim 1 further comprising an active layer for amplifying light trapped in said cavity.