Method and apparatus for vaporizing liquid precursors and system for using same
First Claim
1. A vaporizing apparatus for providing a vaporized liquid precursor to a process chamber in a vapor deposition process, the apparatus comprising:
- a microdroplet forming device configured to generate microdroplets from a liquid precursor;
a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber, the vaporization zone for receiving the microdroplets and a heated carrier gas, the heated carrier gas for vaporizing at least a portion of the microdroplets; and
a detector for detecting undesired particulates in the vapor flow path.
0 Assignments
0 Petitions
Accused Products
Abstract
A vaporizing apparatus and method for providing a vaporized liquid precursor to a process chamber in a vapor deposition process includes a microdroplet forming device for generating microdroplets from a liquid precursor and a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber. The vaporization zone receives the microdroplets and a heated carrier gas. The heated carrier gas has a temperature so as to provide the primary source of heat for vaporizing the microdroplets. The vaporized liquid precursor is then directed to the process chamber from the heated vaporization zone.
78 Citations
24 Claims
-
1. A vaporizing apparatus for providing a vaporized liquid precursor to a process chamber in a vapor deposition process, the apparatus comprising:
-
a microdroplet forming device configured to generate microdroplets from a liquid precursor;
a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber, the vaporization zone for receiving the microdroplets and a heated carrier gas, the heated carrier gas for vaporizing at least a portion of the microdroplets; and
a detector for detecting undesired particulates in the vapor flow path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
a gas flow controller for controlling a flow rate of the heated carrier gas to the vaporization zone, the heated carrier gas being provided to the vaporization zone through a heated gas line connected to the carrier gas port; and
a liquid flow controller for providing the liquid precursor to the microdroplet forming device at a desired flow rate.
-
-
6. The apparatus according to claim 4, wherein the dispensing device comprises an opening for dispensing the microdroplets, the opening being positioned in close proximity to the carrier gas port.
-
7. The apparatus according to claim 1, wherein the microdroplets formed comprise droplets having a diameter of less than 1000 micrometers.
-
8. The apparatus according to claim 1, wherein the microdroplet forming device preheats the microdroplets prior to being introduced into the vaporization zone.
-
9. The apparatus according to claim 1, wherein the vaporization zone is physically separate from the process chamber.
-
10. The apparatus according to claim 9, wherein the vaporization zone is located at least in part within the process chamber but is physically separate therefrom.
-
11. The apparatus according to claim 1, wherein the heated housing comprises at least one wall, the at least one wall being heated by at least one heating element to maintain a substantially constant temperature along the vapor flow path.
-
12. The apparatus according to claim 11, wherein the apparatus comprises at least one monitor for detecting the temperature along the vapor flow path, the at least one heating element changing the temperature of the vapor flow path in response to the detected temperature.
-
13. The apparatus according to claim 1, wherein the microdroplet forming device comprises one of an electrostatic sprayer and an ultrasonic nebulizer.
-
14. A method of vaporizing liquid precursors for vapor deposition processes, the method comprising:
-
generating microdroplets;
vaporizing at least a portion of the microdroplets using a heated carrier gas; and
detecting undesired particulates in the vaporized microdroplets. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
-
Specification