Electrode deposition for organic light-emitting devices
First Claim
1. A method of fabricating an organic light-emitting device, comprising the steps of:
- forming a first electrode over a substrate;
forming two or more layers of light-emissive material over the first electrode, wherein the uppermost layer of organic material is more resistant to sputter deposition than the underlying layer of organic material; and
forming a second electrode over the uppermost layer of organic material, wherein the second electrode comprises at least one layer, the layer adjacent the uppermost layer of organic material being a sputtered layer.
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Abstract
There is disclosed an organic light-emitting device having at least one layer of light-emissive organic material arranged between first and second electrodes, one of the first and second electrodes being a multilayer structure, each layer of the multilayer structure being a DC magnetron sputtered layer. There is also disclosed an organic light-emitting device having two or more layers of light-emissive organic material arranged between first and second electrodes, an uppermost layer of the organic material being more resistant to sputter deposition than an underlying layer of the organic material, and the electrode formed over the uppermost layer of organic material being a sputtered layer. There are also disclosed methods for making such structures.
89 Citations
6 Claims
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1. A method of fabricating an organic light-emitting device, comprising the steps of:
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forming a first electrode over a substrate;
forming two or more layers of light-emissive material over the first electrode, wherein the uppermost layer of organic material is more resistant to sputter deposition than the underlying layer of organic material; and
forming a second electrode over the uppermost layer of organic material, wherein the second electrode comprises at least one layer, the layer adjacent the uppermost layer of organic material being a sputtered layer. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification