Method for controlling optical properties of antireflective coatings
First Claim
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1. A method for processing semiconductors, comprising:
- forming a first layer above a substrate layer;
receiving a signal indicating that a semiconductor processing tool has been serviced;
forming an inorganic antireflective coating layer above the first layer by introducing at least two gases at a first preselected ratio into said semiconductor processing tools; and
varying the ratio of the gases in response to receiving the signal.
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Abstract
A method is used by a semiconductor processing tool. The method comprises forming a first layer above a substrate layer, and forming an inorganic bottom antireflective coating layer above the first layer by introducing at least two gases at a preselected ratio into the semiconductor processing tools. A signal indicating that the semiconductor processing tool has been serviced is received, and the ratio of the gases is varied in response to receiving the signal to control optical parameters of the bottom antireflective coating layer to enhance subsequent photolithographic processes.
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Citations
21 Claims
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1. A method for processing semiconductors, comprising:
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forming a first layer above a substrate layer;
receiving a signal indicating that a semiconductor processing tool has been serviced;
forming an inorganic antireflective coating layer above the first layer by introducing at least two gases at a first preselected ratio into said semiconductor processing tools; and
varying the ratio of the gases in response to receiving the signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for processing semiconductors, comprising:
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forming a first layer above a substrate layer;
receiving a signal indicating that a semiconductor processing tool has been serviced;
forming an inorganic antireflective coating layer above the first layer, said inorganic antireflective coating layer having optical parameters; and
varying the optical parameters in response to receiving the signal. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification