Method for patterning devices

• US 6,403,392 B1
• Filed: 11/28/2000
• Issued: 06/11/2002
• Est. Priority Date: 10/30/1998
• Status: Expired due to Fees

• Current Assignee: The Trustees of Princeton University (Princeton University)
• Original Assignee: The Trustees of Princeton University (Princeton University)
• Inventors: Tian, Peifang, Brown, Julie, Burrows, Paul E., Forrest, Stephen R., Bulovic, Vladimir
• Primary Examiner(s): Bowers, Charles
• Assistant Examiner(s): Brewster, William M.
• Application Number:
  US09/723,287
• Time in Patent Office: 560 Days
• Field of Search: 438/22, 438/35, 438/79, 438/743
• US Class Current: 438/22
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/10 Deposition of organic active material
• CPC Class Codes: H10K 71/13 using printing techniques, e.g. ink-jet printing or screen printing
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/18 using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
• CPC Class Codes: H10K 71/20 Changing the shape of the active layer in the devices, e.g. patterning
• CPC Class Codes: H10K 71/221 by lift-off techniques
• CPC Class Codes: Y02E 10/549 Organic PV cells

Abstract

A method of fabricating a device is provided. A shadow mask is positioned in a first position over a substrate. A first process is performed on the substrate through the shadow mask. After the first process is performed, the shadow mask is moved to a second position over the substrate, measured relative to the first position. After the shadow mask is moved to the second position, a second process is performed on the substrate through the shadow mask.

Claims

1. A method of fabricating a device, comprising the steps of:

(a) fabricating a standoff on a substrate;

(b) positioning a shadow mask in a first position over the substrate and placing the shadow mask onto the standoff;

(c) performing a first process on the substrate through the shadow mask;

(d) after performing the first process, moving the shadow mask to a second position over the substrate, and placing the shadow mask onto the standoff; and

(e) after moving the shadow mask to a second position, performing a second process on the substrate through the shadow mask.

2. The method of claim 1, wherein the first and second processes are deposition processes.

3. The method of claim 2, wherein material deposited during step (e) at least partially covers material deposited during step (c).

4. The method of claim 1, wherein the first and second processes are etching processes.

5. The method of claim 1, wherein the first position is measured relative to features on the substrate.

6. The method of claim 1, wherein the second position is displaced from the first position in a direction approximately parallel to the substrate.

7. The method of claim 6, wherein the second position is also displaced from the first position in a direction approximately perpendicular to the substrate.

8. The method of claim 1, wherein x-y translator motors are used to move the shadow mask during step (d).

9. The method of claim 1, wherein piezo electric materials are used to move the shadow mask during step (d).

10. The method of claim 1, wherein a first charge is applied to the standoff and a second charge having a polarity opposite to that of the first charge is applied to the shadow mask, during a step selected from the group consisting of step (c) and step (e), to facilitate intimate contact between the standoff and the shadow mask during the selected step.

11. The method of claim 1, wherein a first charge is applied to the standoff and a second charge having a polarity the same as that of the first charge is applied to the shadow mask, during step (d), to facilitate the moving of the shadow mask.

12. The method of claim 1, wherein a lubrication layer is applied between the standoff and the shadow mask.

13. The method of claim 1, wherein the device fabricated is a stacked organic light emitting device.

14. The method of claim 1, wherein the device fabricated is a stacked solar cell.

15. The method of claim 13, wherein the device fabricated is incorporated into a display.

16. The method of claim 15, wherein the display is incorporated into a product selected from the group consisting of:

a vehicle, a television, a computer, a printer, a screen, a sign, a telecommunications product and a telephone.

17. The method of claim 13, wherein the device fabricated is incorporated into a printer.

18. The method of claim 1, wherein the second position is measured relative to the first position.

19. A method of fabricating a device, comprising the steps of:

(a) fabricating a standoff on a substrate having first, second, third and fourth contact pads;

(b) after step (a), positioning a shadow mask in a first position over a substrate by placing the shadow mask onto the standoff;

(c) after step (b), depositing a first organic layer through the shadow mask, such that the first organic layer substantially covers the first contact pad;

(d) after step (c), moving the shadow mask to a second position, and placing the shadow mask onto the standoff;

(e) after step (d) depositing a first electrode through the shadow mask, such that the first electrode contacts the second contact pad, has a substantial overlap with the first organic layer, and does not contact any object selected from the group consisting of the first, third and fourth contact pads;

(f) after step (e), moving the shadow mask back to the first position, and placing the shadow mask onto the standoff;

(g) after step (f), depositing a second organic layer through the shadow mask;

(h) after step (g), moving the shadow mask to a third position, and placing the shadow mask onto the standoff;

(i) after step (h), depositing a second electrode through the shadow mask, such that the second electrode contacts the third contact pad, has a substantial overlap with the second organic layer, and does not contact any object selected from the group consisting of the first, second and fourth contact pads, and the first electrode;

(j) after step (i), moving the shadow mask back to the first position, and placing the shadow mask onto the standoff;

(k) after step (i), depositing a third organic layer through the shadow mask;

(l) after step (k), moving the shadow mask to a fourth position, and placing the shadow mask onto the standoff;

(m) after step (l), depositing a third electrode through the shadow mask, such that the third electrode contacts the fourth contact pad, has a substantial overlap with the third organic layer, and does not contact any object selected from the group consisting of the first, second and third contact pads, and the first and second electrodes.

20. A method of fabricating a device, comprising the steps of:

(a) fabricating a standoff on a substrate having first, second, third and fourth contact pads;

(b) after step (a), positioning a shadow mask in a first position over a substrate by placing the shadow mask onto the standoff;

(c) after step (b), depositing a first organic layer through the shadow mask, such that the first organic layer substantially covers the first contact pad;

(d) after step (c), moving the shadow mask to a second position, and placing the shadow mask onto the standoff;

(e) after step (d), depositing a first electrode through the shadow mask, such that the first electrode contacts the second contact pad, has a substantial overlap with the first organic layer, and does not contact any object selected from the group consisting of the first, third and fourth contact pads;

(f) after step (e), moving the shadow mask to a third position, and placing the shadow mask onto the standoff;

(g) after step (f), depositing a second organic layer through the shadow mask;

(h) after step (g), moving the shadow mask to a fourth position, and placing the shadow mask onto the standoff;

(i) after step (h), depositing a second electrode through the shadow mask, such that the second electrode contacts the third contact pad, has a substantial overlap with the second organic layer, and does not contact any object selected from the group consisting of the first, second and fourth contact pads, and the first electrode;

(j) after step (i), moving the shadow mask back to a fifth position, and placing the shadow mask onto the standoff;

(k) after step (j), depositing a third organic layer through the shadow mask;

(l) after step (k), moving the shadow mask to a sixth position, and placing the shadow mask onto the standoff;

(m) after step (l), depositing a third electrode through the shadow mask, such that the third electrode contacts the fourth contact pad, has a substantial overlap with the third organic layer, and does not contact any object selected from the group consisting of the first, second and third contact pads, and the first and second electrodes.