Packaged strain actuator

• US 6,404,107 B1
• Filed: 02/26/1999
• Issued: 06/11/2002
• Est. Priority Date: 01/27/1994
• Status: Expired due to Fees

• Current Assignee: Cymer Incorporated (ASML Holding NV)
• Original Assignee: Active Control eXperts, Inc. (ASML Holding NV)
• Inventors: Lundstrom, Mark E., Crawley, Edward, Moore, Jeffrey W., Russo, Farla, Yoshikawa, Shoko, Lazarus, Kenneth B.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US09/261,475
• Time in Patent Office: 1,201 Days
• Field of Search: 310/328, 310/330-332, 310/340, 310/366
• US Class Current: 310/328
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: H04R 17/08 signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
• CPC Class Codes: H10N 30/204 using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
• CPC Class Codes: H10N 30/2041 Beam type
• CPC Class Codes: H10N 30/2042 Cantilevers, i.e. having one fixed end
• CPC Class Codes: H10N 30/2044 having multiple segments mechanically connected in series, e.g. zig-zag type
• CPC Class Codes: H10N 30/208 using shear or torsion displacement, e.g. d15 type devices
• CPC Class Codes: H10N 30/87 Electrodes or interconnections, e.g. leads or terminals
• CPC Class Codes: H10N 30/88 Mounts; Supports; Enclosures; Casings

Abstract

A modular actuator assembly includes one or more plates or elements of electro-active material bonded to an electroded sheet, preferably by a structural polymer to form a card. The card is sealed, and may itself constitute a practical device, such as a vane, shaker, stirrer, lever, pusher or sonicator for direct contact with a solid or immersion in a fluid, or may be bonded by a stiff adhesive to make a surface-to-surface mechanical coupling with a solid workpiece, device, substrate machine or sample. The structural polymer provides a bending stiffness such that the thin plate does not deform to its breaking point, and a mechanical stiffness such that shear forces are efficiently coupled from the plate to the workpiece. In further embodiments, the card may include active circuit elements for switching, powering or processing signals, and/or passive circuit elements for filtering, matching or damping signals, so that few or no connections to outside circuitry are required. The actuator assembly can be manufactured in quantity, to provide a versatile actuator with uniform mechanical and actuation characteristics, that introduces negligible mass loading to the workpiece. The cards themselves may be arranged as independent mechanical actuators, rather than strain-transfer actuators, in which the induced strain changes the position of the card. Various arrangements of pinned or cantilevered cards may act as a pusher, bender or other motive actuator, and structures such as powered bellows may be formed directly by folding one or more suitably patterned cards.

Claims

1. An actuator device comprising:

an electro-active ceramic element;

a conductor comprising a pair of interdigital electrodes;

an insulator; and

a pair of electrically conductive regions,

wherein said pair of electrically conductive regions are spaced apart from said electro-active ceramic element;

wherein said electro-active element, said conductor; and

said insulator are bonded together such that in-plane strain in said electro-active element is shear coupled between said electro-active element and said insulator;

wherein said pair of interdigital electrodes are in direct mechanical and electrical contact with said electro-active element and in direct electrical contact with said pair of electrically conductive regions; and

wherein each of said pair of interdigital electrodes comprises a plurality of angled line electrodes and a common bus.

3. A method of damping a vibration in an object, the method comprising the steps of:

(a) bonding the actuator device of claim 1 such that the actuator device is shear coupled to said object, and such that in-plane strain of the electro-active element mechanically acts on the object through said insulator when an electrical signal is applied to said pair of interdigital electrodes; and

(b) applying an electrical signal to said pair of interdigital electrodes.

2. An actuator device comprising:

an electro-active ceramic element; and

a flex circuit comprising an insulator and a pair of interdigital electrodes,

wherein said electro-active element is bonded to said flex circuit such that in-plane strain in said electro-active element is shear coupled between said electro-active element and said flex circuit;

wherein said pair of interdigital electrodes are disposed between the insulator and the electro-active ceramic element and are in direct mechanical and electrical contact with said electro-active element; and

wherein each of said pair of interdigital electrodes comprises a plurality of angled line electrodes and a common bus.