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Integrated planar fluxgate sensor

  • US 6,404,192 B1
  • Filed: 05/12/2000
  • Issued: 06/11/2002
  • Est. Priority Date: 05/12/1999
  • Status: Expired due to Fees
First Claim
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1. A substantially planar magnetic sensor, made on a semiconductor substrate, this sensor including:

  • at least one magnetic core which is substantially planar and made on a large planar face of said substrate;

    at least one excitation circuit; and

    at least one detection circuit formed by at least two planar detection coils also made on said large face of the substrate, wherein said excitation circuit includes a single planar excitation coil with turns that form substantially concentric rectangles having progressively decreasing dimensions and defining two diagonals of said planar excitation coil, and wherein said at least one magnetic core comprises long-limbed parts arranged in a Greek cross along the two diagonals of said planar excitation coil, the two planar detection coils being respectively associated with said long-limbed parts along the two diagonals.

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