Planar magnetic element
First Claim
1. A semiconductor planar magnetic element for use in semiconductor fabrication comprising:
- a semiconductor substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said first predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate.
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Accused Products
Abstract
Disclosed herein is a planar magnetic element comprising a substrate, a first magnetic layer arranged over the substrate, a first insulation layer arranged over the first magnetic layer, a planer coil formed of a conductor, having a plurality of turns, arranged over the first insulation layer and having a gap aspect ratio of at least 1, the gap aspect ratio being the ratio of the thickness of the conductor to the gap between any adjacent two of the turns, a second insulation layer arranged over the planar coil, and a second magnetic layer arranged over the second insulation layer. When used as an inductor, the planar magnetic element has a great quality coefficient Q. When used as a transformer, it has a large gain and a high voltage ratio. Since the element is small and thin, it is suitable for use in an integrated circuit, and can greatly contribute to miniaturization of electronic devices.
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Citations
21 Claims
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1. A semiconductor planar magnetic element for use in semiconductor fabrication comprising:
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a semiconductor substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said first predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate. - View Dependent Claims (3, 5, 7, 9, 17, 19)
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2. A DC-DC converter, comprising:
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a switching element;
a semiconductor substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said first predetermined area, and wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate. - View Dependent Claims (4, 6, 8, 10, 12, 14, 16, 18, 20)
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11. A semiconductor planar magnetic element comprising:
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a semiconductor substrate; and
a planar coil structure fabricated on said substrate wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said inductances of said plurality of planar coils are linearly changed.
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13. A semiconductor planar magnetic element comprising:
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a semiconductor substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said plurality of planar coils and said first and second end portions connected to first and second outer terminals, respectively, have similar figures.
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15. A semiconductor planar magnetic element comprising:
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a semiconductor substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said outer terminals have the same figures.
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21. A semiconductor planar magnetic element comprising:
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a substrate; and
a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on the same side of the substrate.
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Specification