Positioning stage system and position measuring method

• US 6,404,505 B2
• Filed: 04/07/1999
• Issued: 06/11/2002
• Est. Priority Date: 04/08/1998
• Status: Expired due to Fees

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Matsui, Shin
• Primary Examiner(s): Pham, Hoa Q.
• Application Number:
  US09/287,262
• Publication Number:
  US 20020003629A1
• Time in Patent Office: 1,161 Days
• Field of Search: 356/375, 356/399, 356/400, 356/401, 356/509, 356/345, 356/356, 356/358, 356/500, 430/22, 430/30, 250/548, 355/53, 355/72, 355/75, 355/43, 355/45, 355/76, 355/55, 378/34
• US Class Current: 356/620
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces
• CPC Class Codes: G03G 17/02 with electrolytic development
• CPC Class Codes: G03G 17/04 using photoelectrophoresis
• CPC Class Codes: G03G 17/06 Apparatus therefor
• CPC Class Codes: G03G 17/08 using an electrophoto-adhesive process, e.g. manifold imaging
• CPC Class Codes: G03G 17/10 using migration imaging, e.g. photoelectrosolography G03G17/04 takes precedence

Abstract

A positioning stage system includes a first stage movable at least in one of a rotational direction and a tilt direction, a second stage movable at least in X and Y directions, a measurement mirror system fixed to the second stage, a reference mirror system disposed on the first stage, and a measuring system for measuring displacement of the measurement mirror system in the X or Y direction, while using the reference mirror system as a positional reference, wherein the reference mirror system is arranged so that laser light incident on the reference mirror system is reflected in the same direction as the incidence direction, substantially constantly.

Claims

1. An apparatus comprising:

a mask stage for holding a mask and being movable at least in one of a rotational direction along the mask surface and a tilt direction to the mask surface;

a substrate stage for holding a substrate, to be exposed, and being movable in X and Y directions along an X-Y plane parallel to the substrate surface;

a measurement mirror system fixed to said substrate stage;

a reference mirror system disposed on said mask stage; and

a measuring system for measuring displacement of said measurement mirror system in the X or Y direction, while using said reference mirror system as a positional reference, and on the basis of laser interference;

wherein the substrate on said substrate stage can be aligned with respect to the mask on the basis of the measurement by said measuring system, and a pattern of the aligned mask can be transferred and printed onto the substrate; and

wherein said reference mirror system is arranged so that laser light incident on said reference mirror system is reflected in the same direction as the incidence direction of the laser light, substantially constantly; and

wherein information related to a positional error, in X and Y directions, of said reference mirror system due to rotation or a change in tilt of the mask stage is detected beforehand in relation to a drive amount of said mask stage, and wherein said measuring system has a function for correcting a measured value in accordance with the drive amount of said mask stage.

2. An apparatus to claim 1, wherein the pattern transfer is made by use of X-rays.

3. An apparatus according to claim 1, wherein said reference mirror system includes retroreflectors.

4. An apparatus according to claim 3, wherein said retroreflectors comprise a corner cube or a cat'"'"'s-eye optical system.

5. An apparatus according to claim 1, wherein said mask stage is controlled so that it is not driven during the projection exposure of the mask pattern to the substrate to be exposed.

6. A device manufacturing method, comprising the steps of:

transferring, by exposure, a pattern of a mask onto a substrate by use of an exposure apparatus including (i) a mask stage for holding the mask and being movable at least in one of a rotational direction along the mask surface and a tilt direction to the mask surface, (ii) a substrate stage for holding the substrate, to be exposed, and being movable in X and Y directions along an X-Y plane parallel to the substrate surface, (iii) a measurement mirror system fixed to the substrate stage, (iv) a reference mirror system disposed on the mask stage, and (v) a measuring system for measuring displacement of the measurement mirror system in the X or Y direction, while using the reference mirror system as a positional reference, and on the basis of laser interference, wherein the substrate on the substrate stage can be aligned with respect to the mask on the basis of the measurement by the measuring system, and a pattern of the aligned mask can be transferred and printed onto the substrate, and wherein the reference mirror system is arranged so that laser light incident on the reference mirror system is reflected in the same direction as the incidence direction of the laser light, substantially constantly;

developing the exposed substrate, whereby a device can be produced from the substrate; and

detecting beforehand information related to a positional error, in X and Y directions, of said reference mirror system due to rotation or a change in tilt of the mask stage in relation to a drive amount of said mask stage, and wherein said measuring system has a function for correcting a measured value in accordance with the drive amount of said mask stage.

7. A method according to claim 6, wherein the mask stage is not driven during the projection exposure of the mask pattern to the substrate to be exposed.

8. An apparatus to claim 6, wherein the pattern transfer is made by use of X-rays.