Method for producing vacuum processing chambers

• US 6,405,423 B1
• Filed: 11/13/2000
• Issued: 06/18/2002
• Est. Priority Date: 09/10/1998
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Donde, Arik
• Primary Examiner(s): Bryant, David P.
• Application Number:
  US09/711,192
• Time in Patent Office: 582 Days
• Field of Search: 220/582, 220/555, 220/916, 220/676, 294/28, 29D/IG.47, 722/54, 723/68, 138/92, 138/114, 138/115
• US Class Current: 29/428
• CPC Class Codes: B29C 48/00 Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor extrusion blow-moulding B29C49/04
• CPC Class Codes: B29C 48/09 Articles with cross-sections having partially or fully enclosed cavities, e.g. pipes or channels
• CPC Class Codes: H01J 37/16 Vessels; Containers
• CPC Class Codes: H01J 37/32458 Vessel
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: Y10S 220/916 Container including axially opposed removable closures
• CPC Class Codes: Y10S 29/047 Extruding with other step
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A structure and method are present where a sidewall of a load lock chamber is formed by extrusion, to produce a reproducible tubular structure to form the walls of a vacuum chamber with greatly improved vacuum performance. The use of an extruded structure reduces the dimensional variability, increases the uniformity of a surface finish, and provides uniform top and bottom sealing arrangements, which allow full and easy access to the inside of the sidewalls for cleaning. In another arrangement heat transfer fluid passages can be formed in the wall of the chamber simultaneously as the wall of the chamber is extruded. Heating or cooling liquid can then be circulated through the passages in the wall of the chamber to heat the walls of the chamber as sometimes required to prevent condensation on the inside of the chamber walls, or provide cooling as is required for cool down of a wafer, after processing at an elevated temperature.

Claims

1. A method of producing a vacuum containment vessel comprising the steps of:

extruding a tubular body element, the tubular body element encircling a central space, said tubular body element having a body side and a first open end and a second open end;

providing sealable openings in the side of the tubular body element;

attaching a first end closure to seal said first end of said tubular body element and attaching a second end closure to seal said second end of said tubular body element.

2. The method of producing a vacuum containment vessel as in claim 1,

wherein said tubular body element includes a series of tubular passages in the wall of said body element separated from said central space by a portion of said body element.

3. The method of producing a vacuum containment vessel as in claim 2, further comprising the step of:

providing fluid communication between at least two tubular passages of said series of tubular passages in the wall of said body element.

4. The method of producing a vacuum containment vessel as in claim 3,

wherein said step of providing fluid communication includes providing grooved passages in the end surfaces of the tubular body element, such that when sealed by a cover said end closures, thermal transfer fluid flowing from a first of said tubular passages in the wall of said body element passes through one of said grooved passages in the end of an tubular body element and into a second of said tubular passages in the wall of said body element.

5. A method of producing a vacuum containment vessel, the method comprising:

extruding a tubular body element, the tubular body element encircling a central space, the tubular body element having a body side and a first open end and a second open end;

providing a sealable opening in the body side of the tubular body element;

attaching a first end closure to seal the first open end of the tubular body element; and

attaching a second end closure to seal the second open end of the tubular body element.

6. The method of producing a vacuum containment vessel as in claim 5, wherein the tubular body element includes a series of tubular passages therein, the series of tubular passages being separated from said central space by a portion of the tubular body element.

7. The method of producing a vacuum containment vessel as in claim 6, further comprising:

providing fluid communication between at least two tubular passages of the series of tubular passages.

8. The method of producing a vacuum containment vessel as in claim 7, wherein providing fluid communication includes providing grooved passages in an end surface of the tubular body element, such that when sealed by one of such said end closures, thermal transfer fluid flowing from a first of said tubular passages in the wall of said body element passes through one of the grooved passages in the end of the tubular body element and into a second of the tubular passages.

9. A method of manufacturing an article for use in processing a semiconductor wafer, the method comprising:

extruding a tubular element, the tubular element encircling a central space, the tubular element having a side and open ends;

forming an opening in the side of the tubular element, the opening being sized so as to permit the semiconductor wafer to be processed to be transferred into and out of the central space.

10. The method of manufacturing an article of claim 9, the method further comprising:

attaching an end closure to an open end of the tubular element.

11. The method of manufacturing an article of claim 9, wherein the tubular element is extruded so that the tubular element includes a series of peripheral tubular passages integral therewith and separated from the central space by a portion of the tubular element, the series of peripheral tubular passages being isolated from the central space.

12. The method of manufacturing an article of claim 9, wherein the tubular element is extruded so as to provide a series of ribs integral therewith for containing peripheral tubular passages separated from the central space by a portion of the tubular element, the series of peripheral tubular passages being isolated from the central space.

13. A method of manufacturing an article for use in processing a semiconductor wafer, the method comprising:

extruding a tubular element, wherein the tubular element encircles a central space, wherein the tubular element has a side and open ends, and wherein the tubular element is extruded so that the tubular element includes a series of peripheral tubular passages integral therewith and separated from the central space by a portion of the tubular element, the series of peripheral tubular passages being isolated from the central space; and

providing fluid connection between the series of peripheral tubular passages.

14. The method of manufacturing an article of claim 13, the method further comprising:

forming an opening in the side of the tubular element, the opening being sized so as to permit the semiconductor wafer to be processed to be transferred into and out of the central space.