Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby
First Claim
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1. A method of forming a needle, said method comprising the steps of:
- anisotropically etching a channel into the back side of a semiconductor substrate; and
isotropically etching the front side of said semiconductor substrate to form a vertical axial surface surrounding said channel, said vertical axial surface having a rounded cross-sectional profile between a tip of said needle and a base of said needle.
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Abstract
A method of forming a needle includes the step of anisotropically etching a channel into the back side of a semiconductor substrate. The front side of the semiconductor substrate is then isotropically etched to form a vertical axial surface surrounding the channel. The resultant needle has an elongated body formed of a semiconductor material. The elongated body includes an axial surface positioned between a first end and a second end. The axial surface defines a channel between the first end and the second end. In one embodiment, the first end has a sloping tip with a single circumferential termination point.
81 Citations
40 Claims
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1. A method of forming a needle, said method comprising the steps of:
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anisotropically etching a channel into the back side of a semiconductor substrate; and
isotropically etching the front side of said semiconductor substrate to form a vertical axial surface surrounding said channel, said vertical axial surface having a rounded cross-sectional profile between a tip of said needle and a base of said needle. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of forming a matrix of needles, said method comprising the steps of:
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anisotropically etching channels into the back side of a semiconductor substrate; and
isotropically etching the front side of said semiconductor substrate to form vertical axial surfaces surrounding said channels, said vertical axial surfaces each having a rounded cross-sectional profile between a tip and a base of respective ones of said needles. - View Dependent Claims (9, 10, 11, 12)
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13. A method of forming a needle, said method comprising the steps of:
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anisotropically etching a channel into the back side of said semiconductor substrate with a channel mask;
isotropically etching the front side of said semiconductor substrate to form a vertical axial surface surrounding said channel with a needle mask, wherein said channel mask and said needle mask are offset by a predetermined distance such that a plane at which a surface of said channel and said vertical axial surface intersects is unparallel to said front side of said semiconductor substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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21. A method of forming a needle comprising:
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anisotropically etching a first side of a substrate to form a channel; and
isotropically etching a second side of the substrate to form a vertical axial surface surrounding the channel, wherein the first side is opposite to the second side. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
the anisotropically etching step is performed with a first mask having a first center and a first centerline passing through the first center, the isotropically etching step is performed with a second mask having a second center and a second centerline passing through said second center, and the first centerline is a predetermined distance from the second centerline.
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31. The method of claim 22 further comprising depositing oxide to cover an entire surface of the channel prior to the isotropically etching step.
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32. A needle formed by the method of claim 26.
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33. A method of forming a matrix of needles comprising:
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anisotropically etching a first side of a substrate to form a plurality of channels; and
isotropically etching a second side of the substrate to form a plurality of vertical axial surfaces, each of the plurality of vertical axial surfaces surrounding one of the plurality of channels, wherein the first side is opposite to the second side. - View Dependent Claims (34, 35, 36, 37, 39, 40)
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38. The method of 33 claim further comprising utilizing the matrix of needles as a mold.
Specification