Laser cutting apparatus and method

• US 6,407,360 B1
• Filed: 01/14/1999
• Issued: 06/18/2002
• Est. Priority Date: 08/26/1998
• Status: Expired due to Term

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Bum-soo, Kim, Byeong-ill, Jung, Sung-uk, Choo, Dae-ho, Lee, Woo-shik
• Primary Examiner(s): Evans, Geoffrey S.
• Application Number:
  US09/231,091
• Time in Patent Office: 1,251 Days
• Field of Search: 219/121.67, 219/121.72, 219/121.68, 219/121.69, 225/1, 225/93.5, 225/96
• US Class Current: 219/121.67
• CPC Class Codes: B23K 2101/40 Semiconductor devices
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/044 Seam tracking
• CPC Class Codes: B23K 26/046 Automatically focusing the laser beam
• CPC Class Codes: B23K 26/0604 by a combination of beams
• CPC Class Codes: B23K 26/0608 in the same heat affected zone [HAZ] B23K26/0613, B23K26/0619 take precedence
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: B23K 26/0736 into an oval shape, e.g. elliptic shape
• CPC Class Codes: B23K 26/0884 in at least in three axial directions, e.g. manipulators, robots
• CPC Class Codes: B23K 26/10 using a fixed support , i.e. involving moving the laser beam
• CPC Class Codes: B23K 26/127 in an enclosure
• CPC Class Codes: B23K 26/146 the fluid stream containing a liquid
• CPC Class Codes: B23K 26/1462 Nozzles; Features related to nozzles
• CPC Class Codes: B23K 26/361 for deburring or mechanical trimming B23K26/351 takes precedence
• CPC Class Codes: B23K 26/364 for making a groove or trench, e.g. for scribing a break initiation groove
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved
• CPC Class Codes: B23K 26/60 Preliminary treatment
• CPC Class Codes: B28D 1/221 by thermic methods
• CPC Class Codes: B28D 5/00 Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor working by grinding or polishing B24; for artistic purposes B44B
• CPC Class Codes: B28D 5/0076 for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
• CPC Class Codes: B32B 2457/202 : LCD, i.e. liquid crystal displays
• CPC Class Codes: C03B 29/025 : Glass sheets
• CPC Class Codes: C03B 33/076 : Laminated glass comprising interlayers
• CPC Class Codes: C03B 33/091 : using at least one focussed radiation beam, e.g. laser beam C03B33/0955 takes precedence
• CPC Class Codes: C03B 33/093 : using two or more focussed radiation beams
• CPC Class Codes: G02F 1/133351 : Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
• CPC Class Codes: H01L 21/67092 : Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: Y02P 40/57 : Improving the yield, e-g- reduction of reject rates

Abstract

A laser cutter for cutting an object being cut such as a two glasses-attached panel for LCD using a laser beam. The laser cutter includes a laser unit for irradiating a laser beam with a specific wavelength along a marked cutting line of the object, a pre-scriber for forming a pre-cut groove at starting edge of the marked cutting line, and a cooling unit for cooling the cutting line which said laser beam has been irradiated. The pre-scriber can be a rotating blade.

Claims

1. A laser cutter, comprising:

a laser unit for irradiating a laser beam with a specific wavelength along a cutting line of a target object being cut;

means for forming a pre-cut groove at a selected portion of the cutting line;

a cooling unit that supplies a coolant to the target object along the cutting line on which the laser beam has been irradiated; and

a coolant inhaler for inhaling a coolant supplied to the target object,

wherein said means for forming a pre-cut groove comprises;

a first rod disposed in front of traveling direction of said laser unit;

a second rod pivotally coupled to said first rod, said second rod rotating clockwise or counterclockwise; and

a rotating blade coupled to one-sided end of said second rod, for forming a pre-cut groove at a selected portion of the cutting line of the object being cut.

2. A laser cutter as claimed in claim 1, further comprising means for moving said laser unit, said means for forming a pre-cut groove, and said cooling unit to a selected direction.

3. A laser cutter as claimed in claim 1, further comprising means for moving the target object being cut to a selected direction.

4. A laser cutter as claimed in claim 1, wherein the selected portion is at least one of start edge and end edge of the cutting line.

5. A laser cutter as claimed in claim 1, wherein the cutting line is at least two that are perpendicular to each other, and the selected portion is a cross point where the cutting lines cross each other.

6. A laser cutter as claimed in claim 5, wherein the pre-cut groove formed at the cross point has a selected length along the cutting lines from the cross point.

7. A laser cutter as claimed in claim 5, wherein the pre-cut groove formed at the cross point is a circular structure.

8. A laser cutter as claimed in claim 1, wherein the cutting line is at least two, consisting of a first cutting line and a second cutting line normal to the first cutting line, and the selected portion is a start edge of the second cutting line.

9. A laser cutter as claimed in claim 1, wherein the object being cut is a substrate of two glasses attached together.

10. A laser cutter as claimed in claim 9, wherein the two glasses are respectively a color filter substrate and a thin film transistor substrate, wherein the thin film transistor substrate comprises a thin film transistor formed on an inner surface thereof, data and gate bus lines, and a pixel electrode, and wherein the color filter substrate comprises a color filter formed on an inner surface thereof and a counter electrode formed on the color filter.

11. A laser cutter as claimed in claim 9, wherein the substrate of two glasses attached together has an area corresponding to at least two unit liquid crystal display panel size and a space formed between the two attached glasses.

12. A laser cutter as claimed in claim 11, wherein said cooling unit comprises:

a coolant supply part for supplying a coolant; and

a spray nozzle for spraying the coolant along the cutting line of the target object on which the laser beam has been irradiated.

13. A laser cutter as claimed in claim 12, wherein said spray nozzle has an oblique tip.

14. A laser cutter as claimed in claim 12, wherein said coolant inhaler comprises:

an inhaling pipe disposed at the back of said cooling unit with respect to the traveling direction of said laser unit; and

a pump for making the inhaling pipe in a vacuum state.

15. A laser cutter as claimed in claim 14, wherein pressure of said pump is lower than that of the coolant.