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Apparatus and method for reviewing defects on an object

  • US 6,407,373 B1
  • Filed: 06/15/1999
  • Issued: 06/18/2002
  • Est. Priority Date: 06/15/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus for reviewing defects on an object surface, based on a previously generated defect map, said apparatus comprising:

  • a stage for receiving said object thereon;

    an optical microscope comprising an illumination source providing a light beam, said optical microscope directing said light beam toward a selected portion of said object surface based on information contained in the defect map;

    a light sensor coupled to said optical microscope for detecting defects illuminated by said light beam;

    a particle beam imaging system for converging a beam of particles to a focal point along a prescribed axis; and

    a translation system positioning said redetected defect proximate said focal point;

    wherein said redetected defect can be subsequently reviewed using said particle beam imaging system.

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