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Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature

  • US 6,407,478 B1
  • Filed: 08/21/2001
  • Issued: 06/18/2002
  • Est. Priority Date: 08/21/2000
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical device, comprising:

  • a first beam member that has an end that is connected to a first anchor;

    a second beam member that has an end that is connected to a second anchor, the second beam member being configured to elongate when the second beam member is heated to a temperature that is greater than a temperature of the first beam member; and

    a contact that comprises a first conductive region that connects the first and the second beam members, a second conductive region, and an isolation region that electrically isolates the first conductive region from the second conductive region.

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