Electron beam accelerator

• US 6,407,492 B1
• Filed: 07/09/1999
• Issued: 06/18/2002
• Est. Priority Date: 01/02/1997
• Status: Expired due to Term

• Current Assignee: Applied Advanced Technologies Incorporated, Serac Group SA
• Original Assignee: Advanced Electron Beams, Inc.
• Inventors: Avnery, Tzvi, Felis, Kenneth P.
• Primary Examiner(s): Anderson, Bruce
• Assistant Examiner(s): Wells, Nikita
• Application Number:
  US09/349,592
• Time in Patent Office: 1,075 Days
• Field of Search: 315/500, 315/506, 315/507, 315/111.61, 250/492.3, 250/492.1, 313/420, 313/363.1
• US Class Current: 313/420
• CPC Class Codes: H01J 3/027 Construction of the gun or parts thereof H01J3/021 - H01J3/025, H01J3/026 and H01J3/028 take precedence
• CPC Class Codes: H01J 33/00 Discharge tubes with provision for emergence of electrons or ions from the vessel irradiation devices G21K ; particle accelerators H05H; Lenard tubes
• CPC Class Codes: H01J 33/02 Details vessels for operation at high tension H01J5/06

Abstract

An electron accelerator includes a vacuum chamber having an electron beam exit window. The exit window is formed of metallic foil bonded in metal to metal contact with the vacuum chamber to provide a gas tight seal therebetween. The exit window is less than about 12.5 microns thick. The vacuum chamber is hermetically sealed to preserve a permanent self-sustained vacuum therein. An electron generator is positioned within the vacuum chamber for generating electrons. A housing surrounds the electron generator. The housing has an electron permeable region formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window.

Claims

1. An electron accelerator comprising:

a vacuum chamber having an electron beam exit window, the exit window being formed of metallic foil bonded in metal to metal contact with the vacuum chamber to provide a gas tight seal therebetween, the exit window being less than about 12.5 microns thick, the vacuum chamber being hermetically sealed to preserve a permanent self sustained vacuum therein;

an electron generator positioned within the vacuum chamber for generating electrons; and

a housing surrounding the electron generator, the housing having an electron permeable region formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window.

2. The accelerator of claim 1 in which the vacuum chamber comprises an elongate ceramic member.

3. The accelerator of claim 2 in which the elongate ceramic member is corrugated.

4. The accelerator of claim 3 further comprising an annular spring member coupled between the exit window and the ceramic member.

5. The accelerator of claim 2 in which the vacuum chamber further comprises a metallic shell surrounding the ceramic member.

6. The accelerator of claim 5 in which the ceramic member includes a frustoconical hole, the accelerator further comprising:

an electrical lead extending through the frustoconical hole for supplying power to the electron generator;

a flexible insulating plug surrounding the electrical lead, the plug including a frustoconical surface for sealing with the frustoconical hole; and

a retaining cap secured to the shell for retaining the plug within the frustoconical hole.

7. The accelerator of claim 1 in which the electron permeable region comprises a series of openings in the housing.

8. The accelerator of claim 1 in which the exit window is formed of titanium foil.

9. The accelerator of claim 8 in which the exit window is between about 8 to 10 microns thick.

10.The accelerator of claim 1 further comprising a support plate for supporting the exit window, the support plate having a series of holes therethrough for allowing the electrons to pass through, the configuration of the holes being arrangable to vary electron permeability across the support plate for providing the electron beam with a variable intensity profile.

10. An electron accelerator comprising:

a vacuum chamber having an electron beam exit window;

an electron generator positioned within the vacuum chamber for generating electrons; and

a housing surrounding the electron generator, the housing having an electron permeable region formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window, the housing also having a passive electrical field line shaper for causing electrons to be uniformly distributed across the electron beam.

11. The accelerator of claim 11 in which the electron permeable region comprises a first series of openings in the housing.

12. The accelerator of claim 12 in which the passive electrical field line shaper comprises a second and third series of openings formed in the housing on opposite sides of the electron generator.

13. A method of accelerating electrons comprising the steps of:

providing a vacuum chamber having an electron beam exit window, the exit window being formed of metallic foil bonded in metal to metal contact with the vacuum chamber to provide a gas tight seal therebetween, the exit window being less than about 12.5 microns thick, the vacuum chamber being hermetically sealed to preserve a self sustained vacuum therein;

generating electrons with an electron generator positioned within the vacuum chamber; and

surrounding the electron generator with a housing, the housing having an electron permeable region formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window.

14. The method of claim 14 further comprising the step of providing the vacuum chamber with an elongate ceramic member.

19. The method of claim 14 further comprising the step of supporting the exit window with a support plate, the support plate having a series of holes therethrough for allowing the electrons to pass through, the configuration of the holes being arrangable to vary electron permeability across the support plate for providing the electron beam with a variable intensity profile.

15. The method of claim 15 further comprising the step of providing the elongate ceramic member with corrugations.

17. The method of claim 15 further comprising the step of surrounding the ceramic member with a metallic shell.

16. The method of claim 16 further comprising the step of coupling an annular spring member between the exit window and the ceramic member.

18. The method of claim 18 in which the ceramic member includes a frustoconical hole, the method further comprising the steps of:

extending an electrical lead through the frustoconical hole for supplying power to the electron generator;

surrounding the electrical lead with a flexible insulating plug, the plug including a frustoconical surface for sealing with the frustoconical hole; and

retaining the plug within the frustoconical hole with a retaining cap secured to the shell.

20. A method of accelerating electrons comprising the steps of:

providing a vacuum chamber having an electron beam exit window;

generating electrons with an electron generator positioned within the vacuum chamber;

surrounding the electron generator with a housing, the housing having a electron permeable region formed in the housing between the electron generator and the exit window, the housing also having a passive electrical field line shaper;

accelerating the electrons from the electron generator out the exit window in an electron beam by applying a voltage potential between the housing and the exit window; and

uniformly distributing electrons across the electron beam between the electron generator and the exit window with the passive electrical field line shaper.