Z-pinch plasma X-ray source using surface discharge preionization

• US 6,408,052 B1
• Filed: 04/06/2000
• Issued: 06/18/2002
• Est. Priority Date: 04/06/2000
• Status: Expired due to Fees

• Current Assignee: Plex, LLC
• Original Assignee: Plex, LLC
• Inventors: McGeoch, Malcolm W.
• Primary Examiner(s): Kim, Robert H.
• Assistant Examiner(s): Kiknadze, Irakli
• Application Number:
  US09/543,495
• Time in Patent Office: 803 Days
• Field of Search: 378/119, 378/121, 378/34, 378/122
• US Class Current: 378/119
• CPC Class Codes: H05G 2/003 being produced from a liquid or gas
• CPC Class Codes: H05G 2/005 containing a metal as principal radiation generating component
• CPC Class Codes: H05H 1/06 Longitudinal pinch devices

Abstract

A Z-pinch plasma X-ray source includes a chamber having an insulating wall and defining a pinch region, a pinch anode and a pinch cathode positioned at opposite ends of the pinch region, a first conductor defining an edge in close proximity to or contacting an inside surface of the insulating wall and a second conductor disposed around an outside surface of the insulating wall. A surface discharge is produced on the inside surface of the insulating wall in response to application of a voltage to the first and second conductors. The surface discharge causes the gas to ionize and to form a plasma shell near the inside surface of the insulating wall. The pinch anode and the pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in the pinch region in response to application of a high energy electric pulse to the pinch anode and the pinch cathode. The azimuthal magnetic field causes the plasma shell to collapse to the central axis and to generate X-rays.

Claims

1. A Z-pinch plasma X-ray source comprising:

a chamber containing a gas at a prescribed pressure, said chamber comprising an insulating wall and defining a pinch region having a central axis, said insulating wall having an inside surface and an outside surface;

a pinch anode disposed at one end of said pinch region;

a conductive shell surrounding said insulating wall and electrically connected to said pinch anode;

a pinch cathode disposed at an opposite end of said pinch region;

a first conductor defining an edge in close proximity to or contacting the inside surface of said insulating wall; and

a second conductor disposed around the outside surface of said insulating wall, wherein a surface discharge is produced on the inside surface of said insulating wall in response to application of a voltage to said first and second conductors, said surface discharge causing the gas to ionize and to form a plasma shell near the inside surface of said insulating wall,

wherein said pinch anode and said pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in said pinch region in response to application of a high energy electrical pulse to said pinch anode and said pinch cathode,

whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays.

2. A Z-pinch plasma X-ray source as defined in claim 1 wherein said second conductor comprises said conductive shell.

3. A Z-pinch plasma X-ray source as defined in claim 1 wherein said second conductor comprises a preionizer control electrode positioned between said conductive shell and said insulating wall, said preionizer control electrode being coupled to a preionizer voltage source.

4. A Z-pinch plasma X-ray source as defined in claim 3 wherein said preionizer voltage source comprises a radio frequency source.

5. A Z-pinch plasma X-ray source as defined in claim 1 wherein said first conductor comprises said cathode and wherein said cathode is tapered toward said insulating wall to define said edge.

6. A Z-pinch plasma X-ray source as defined in claim 1 wherein said first conductor comprises a cathode extension coupled between said cathode and said insulating wall.

7. A Z-pinch plasma X-ray source as defined in claim 1 wherein said first conductor has an annular configuration.

8. A Z-pinch plasma X-ray source as defined in claim 5 wherein said cathode is in physical contact with said insulating wall.

9. A Z-pinch plasma X-ray source as defined in claim 5 wherein said cathode is in close proximity to said insulating wall.

10. A Z-pinch plasma X-ray source as defined in claim 1 wherein the inside surface of said insulating wall is at least in part cylindrical.

11. A Z-pinch plasma X-ray source as defined in claim 1 wherein the inside surface of said insulating wall is at least in part spherical.

12. A Z-pinch plasma X-ray source as defined in claim 3 wherein said preionizer control electrode comprises a cylindrical electrode located on the outside surface of said insulating wall.

13. A Z-pinch plasma X-ray source as defined in claim 3 wherein said preionizer control electrode comprises a plurality of electrode elements having separate voltages applied thereto.

14. A Z-pinch plasma X-ray source as defined in claim 3 wherein said preionizer control electrode comprises a helical electrode.

15. A Z-pinch plasma X-ray source as defined in claim 3 further comprising means for applying a preionizer voltage to said preionizer control electrode prior to application of said high energy electrical pulse to said pinch anode and said pinch cathode.

16. A Z-pinch plasma X-ray source as defined in claim 1 wherein said high energy electrical pulse is generated by a solid state switched pulse generator with magnetic pulse compression.

17. A Z-pinch plasma X-ray source as defined in claim 1 wherein said gas comprises xenon for the generation of extreme ultraviolet radiation in a band between 100 Angstroms and 150 Angstroms.

18. A Z-pinch plasma X-ray source as defined in claim 1 wherein said gas comprises lithium for the generation of the doubly ionized lithium resonance line at 135 Angstroms.

19. A Z-pinch plasma X-ray source as defined in claim 18 wherein a carrier gas is used to deliver and remove lithium vapor.

20. A Z-pinch plasma X-ray source as defined in claim 19 wherein the carrier gas comprises argon.

21. A Z-pinch plasma X-ray system comprising:

a chamber comprising an insulating wall and defining a pinch region having a central axis, said insulating wall having an inside surface and an outside surface;

a pinch anode disposed at one end of said pinch region;

a conductive shell surrounding said insulating wall and electrically connected to said pinch anode;

a pinch cathode disposed at an opposite end of said pinch region;

a gas supply system coupled to said chamber;

a first conductor defining an edge in close proximity to or contacting the inside surface of said insulating wall;

a second conductor disposed around the outside surface of said insulating wall, wherein a surface discharge is produced on the inside surface of said insulating wall in response to application of a voltage to said first and second conductors, said surface discharge causing the gas to ionize and to form a plasma shell near the inside surface of said insulating wall; and

a drive circuit connected to said pinch anode and said pinch cathode for applying a high energy electrical pulse to said pinch anode and said pinch cathode, said high energy electrical pulse producing a current through the plasma shell in an axial direction and producing an azimuthal magnetic field in said pinch region, whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays.

22. A Z-pinch plasma X-ray system as defined in claim 21 wherein said gas supply system comprises a vacuum pump coupled to said pinch region for recompression of exhaust gas pumped from said pinch region and for recirculating the gas to said pinch region.

23. A Z-pinch plasma X-ray system as defined in claim 22 wherein said gas supply system further comprises a filter module for filtration and purification of the gas exhausted from said pinch region prior to its return to the pinch region.

24. A Z-pinch plasma X-ray system as defined in claim 21 further comprising a barrier plate located on said axis outside said pinch region, said barrier plate having a multiplicity of aligned holes for passing soft X-rays or extreme ultraviolet radiation while impeding the flow of gas from the pinch region.

25. A Z-pinch plasma X-ray system as defined in claim 21 wherein said second conductor comprises said conductive shell.

26. A Z-pinch plasma X-ray system as defined in claim 21 wherein said second conductor comprises a preionizer control electrode positioned between said conductive shell and said insulating wall, said preionizer control electrode being coupled to a preionizer voltage source.

27. A Z-pinch plasma X-ray system as defined in claim 26 wherein said preionizer voltage source comprises a radio frequency power source.

28. A Z-pinch plasma X-ray system as defined in claim 21 wherein said first conductor comprises said cathode and wherein said cathode is tapered toward said insulating wall to define said edge.

29. A Z-pinch plasma X-ray system as defined in claim 21 wherein said first conductor comprises a cathode extension coupled between said cathode and said insulating wall.

30. A Z-pinch plasma X-ray system as defined in claim 21 wherein the edge of said first conductor has an annular configuration and is located at or near one end of said pinch region.

31. A Z-pinch plasma X-ray system as defined in claim 21 wherein the inside surface of said insulating wall is at least in part cylindrical.

32. A Z-pinch plasma X-ray system as defined in claim 21 wherein the inside surface of said insulating wall is at least in part spherical.

33. A Z-pinch plasma X-ray system as defined in claim 26 wherein said preionizer control electrode comprises a cylindrical electrode and is located on the outside surface of said insulating wall.

34. A Z-pinch plasma X-ray system as defined in claim 26 wherein said prelonizer control electrode comprises a plurality of electrode elements having separate voltages applied thereto.

35. A Z-pinch plasma X-ray system as defined in claim 26 wherein said preionizer control electrode comprises a helical electrode.

36. A Z-pinch plasma X-ray system as defined in claim 26 further comprising means for applying a preionizer voltage to said preionizer control electrode prior to application of said high energy electrical pulse to said pinch anode and said pinch cathode.

37. A method for generating soft X-rays or extreme ultraviolet radiation in a Z-pinch plasma X-ray source comprising a Z-pinch chamber containing a gas at a prescribed pressure, said chamber comprising an insulating wall and defining a pinch region having a central axis, a pinch anode disposed at one end of said pinch region and a pinch cathode disposed at an opposite end of said pinch region, said method comprising the steps of:

producing, on an inside surface of said insulating wall, a surface discharge that causes the gas to ionize and to form a plasma shell near said insulating wall; and

applying a high energy electrical pulse to said pinch anode and said pinch cathode to produce a current through the plasma shell in an axial direction and to produce an azimuthal magnetic field in said pinch region, whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays.

38. A method as defined in claim 37 wherein the step of producing a surface discharge comprises the steps of providing a first conductor defining an edge in close proximity to or contacting the inside surface of said insulating wall, providing a second conductor on the outside surface of said insulating wall and applying a voltage to said first and second conductors, wherein the surface discharge is produced on the inside surface of said insulating wall.

39. A method as defined in claim 38 wherein the step of applying a voltage to said first and second conductors comprises applying said high energy electrical pulse to said first and second conductors.

40. A method as defined in claim 38 wherein the step of providing a second conductor comprises providing a preionizer control electrode positioned on the outside surface of said insulating wall and wherein the step of applying a voltage to said first and second conductors comprises applying a preionizer voltage to said preionizer control electrode.

41. A method as defined in claim 40 wherein the step of applying a preionizer voltage to said preionizer control electrode comprises applying the preionizer voltage to said preionizer control electrode prior to the application of said high energy electrical pulse to said pinch anode and said pinch cathode.

42. A Z-pinch plasma X-ray source comprising:

a chamber containing a gas at a prescribed pressure, said chamber comprising an insulating wall and defining a pinch region having a central axis, said insulating wall having an inside surface and an outside surface;

a pinch anode and a pinch cathode disposed at opposite ends of said pinch region;

a conductive shell surrounding said insulating wall and electrically connected to said pinch anode;

means for producing a surface discharge on the inside surface of said insulating wall, said surface discharge causing the gas to ionize and to form a plasma shell near the inside surface of said insulating wall,

wherein said pinch anode and said pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in said pinch region in response to application of a high energy electrical pulse to said pinch anode and said pinch cathode,

whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays.