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Microfabricated elastomeric valve and pump systems

  • US 6,408,878 B2
  • Filed: 02/28/2001
  • Issued: 06/25/2002
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Term
First Claim
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1. A microfabricated elastomeric structure, comprising:

  • an elastomeric block formed with microfabricated recesses having a width less than 1000 μ

    m therein, a portion of the elastomeric block is deflectable into one of the recesses when the portion is actuated.

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