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Chemical microreactors and method for producing same

  • US 6,409,072 B1
  • Filed: 10/25/1999
  • Issued: 06/25/2002
  • Est. Priority Date: 02/20/1997
  • Status: Expired due to Term
First Claim
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1. Manufacturing process for chemical microreactors including at least one substrate with a metal coating on at least one side thereof, the process forming fluid ducts as well as feeding and drain ducts for fluids, without using plastic molding techniques comprising the following steps of:

  • a.) coating with a resist layer in a pattern forming fluid duct structures for forming fluid ducts on a metal surface located on each substrate by layering means selected from a group consisting of photoresist layering and screen-printed varnish layering, so that the metal surfaces are partly covered by the resist coating layer;

    b.) removing metal from each uncoated metal surface of each substrate by a process selected from the group consisting of electroless and electrochemical etching;

    c.) totally removing the resist coating layer;

    d.) forming solder layers by depositing metals that can form eutectics;

    e.) superimposing each substrate and a closure segment closing the fluid ducts, and interconnecting each substrate and the closure segment by soldering.

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