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Microwave plasma chemical synthesis of ultrafine powders

  • US 6,409,851 B1
  • Filed: 03/05/1999
  • Issued: 06/25/2002
  • Est. Priority Date: 11/04/1996
  • Status: Expired due to Term
First Claim
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1. An apparatus for the microwave synthesis of materials, comprising:

  • a microwave generator;

    a waveguide through which a microwave generated by said microwave generator passes into a plasma zone positioned such that a plasma is capable of heating reactants to form reaction products;

    a plasma gas inlet offset at an angle so that plasma gas passing through the inlet enters the plasma zone in a spiral-shaped pattern; and

    a reaction products collector downstream from said plasma zone for collecting the reaction products.

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