Sputtering target and its manufacturing method

• US 6,409,965 B1
• Filed: 09/21/2000
• Issued: 06/25/2002
• Est. Priority Date: 09/21/1999
• Status: Expired due to Term

• Current Assignee: Dexerials Corporation
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Nagata, Takahiro, Kimura, Hitoshi, Sasaki, Manabu, Yokoyama, Norio
• Primary Examiner(s): VerSteeg, Steven H.
• Application Number:
  US09/666,241
• Time in Patent Office: 642 Days
• Field of Search: 204/298.13, 148/301, 148/514, 420/416, 420/590, 419/66, 419/6, 419/10, 419/26
• US Class Current: 419/26
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Abstract

An ingot is made from a used target of 30 weight % or more, and new metals of the same components, and recycled alloy powder is made by a gas atomizing process. Magnetic permeability is controlled not to exceed 2 by adjusting the content of rare earth metals in rare earth alloy powder to be at least 35 weight %. By blending the recycled alloy powder with other powder to produce alloy powder containing at least 50 weight % of rare earth alloy powder having a magnetic permeability not higher than 2 and containing at least 65 weight % of rare earth alloy powder. By sintering the alloy powder under pressure and thereafter cutting top, bottom and side surfaces of the sintered material, a target having a magnetic permeability not higher than 2 and having a thickness not less than 8 mm is fabricated.

Claims

1. A method for manufacturing a sputtering target, the method comprising:

presenting an alloy powder which contains at least 65 weight percent of at least one rare earth alloy powder, wherein the at least one rare earth alloy powder comprises at least one rare earth element, at least two elements selected from the group consisting of Fe, Co, Ni, Cr and Si, and at least one recycled alloy powder prepared by using a target used at least once for sputtering;

melting the alloy powder; and

atomizing the melted alloy powder, wherein the alloy powder includes no more than 0.1 weight percent metal impurities from a crushing member.

2. The method of claim 1 wherein the alloy powder contains not less than 70 weight percent of the rare earth alloy powder.

3. The method of claim 1 wherein the alloy powder contains not less than 50 weight percent of a rare earth alloy powder having a magnetic permeability, wherein the magnetic permeability cannot be higher than 2.

4. The method of claim 3 wherein the rare earth alloy powder having a magnetic permeability that cannot be higher than 2 contains not less than 35 weight percent of at least one rare earth element.

5. The method of claim 1 wherein the alloy powder comprises a magnetic permeability that cannot be higher than 2.

6. The method of claim 1 wherein the alloy powder contains not less than 30 weight percent of the at least one recycled alloy powder.

7. The method of claim 1 wherein atomizing the alloy powder includes melting an ingot formed from the alloy powder.

8. The method of claim 7 wherein atomizing the alloy comprises a gas atomizing process.

9. The method of claim 1 wherein the at least one rare earth element is selected from the group consisting of Tb, Gd, Dy, Sm, Nd, La, and Y.