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Wafer processing system

  • US 6,410,455 B1
  • Filed: 11/30/1999
  • Issued: 06/25/2002
  • Est. Priority Date: 11/30/1999
  • Status: Expired due to Fees
First Claim
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1. A wafer processing system comprising:

  • a loading station having a platform for rotating a wafer carrier from a first position to a second position, the loading station having an elevator for raising the wafer carrier into a load lock;

    a first reactor; and

    , a robot having extension, rotational, and vertical motion, the robot being operable to move a wafer from the wafer carrier to the first reactor.

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