Microactuator array with integrally formed package

• US 6,411,013 B1
• Filed: 12/30/1999
• Issued: 06/25/2002
• Est. Priority Date: 12/30/1999
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Horning, Robert D.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US09/476,667
• Time in Patent Office: 908 Days
• Field of Search: 310/330, 310/331, 310/332, 310/328, 310/800, 310/366, 310/340, 310/309
• US Class Current: 310/330
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10S 310/80 Piezoelectric polymers, e.g. PVDF

Abstract

A microactuator array with an integrally formed package is disclosed. Because the package is made from the same material and at the same time as the actuator itself, no extra time or cost is associated with packaging. In addition, it is contemplated that the package may be configured to provide all the necessary interconnections and leads for addressing and distributing power to the various layers in the microactuator stack. Thus, no additional steps or cost are associated with electrical interconnection.

Claims

1. A thin sheet for use in a microactuator device, comprising:

an electrode region situated on or in the thin sheet, the electrode region having an outer perimeter and at least one conductive electrode;

a frame region having a first major surface and a second major surface, the frame region extending around and spaced from the outer perimeter of the electrode region;

one or more bridge means for connecting the electrode region to the frame region;

a first bonding region extending along at least a portion of the first major surface of the frame region; and

a second boding region extending along at least a portion of the second major surface of the frame region.

2. A thin sheet according to claim 1, wherein the thin sheet is a thin polymer sheet.

3. A thin sheet according to claim 1, further comprising a third bonding region extending along at least a portion of the electrode region.

4. A thin sheet according to claim 1, wherein the electrode region includes two or more conductive electrodes, and wherein each of the two or more conductive electrodes are electrically isolated from one another.

5. A thin sheet according to claim 4, further comprising a third bonding region extending between two of the electrically isolated electrodes.

6. A thin sheet according to claim 1, wherein the frame region has an outer perimeter and an inner perimeter, the first bonding region extending closer to the outer perimeter than the inner perimeter.

7. A thin sheet according to claim 3, wherein the second bonding region extends closer to the inner perimeter than the outer perimeter.

8. A thin sheet according to claim 7, wherein the first bonding region extends around the entire inner perimeter of the frame region.

9. A thin sheet according to claim 8, wherein the second bonding region extends around the entire inner perimeter of the frame region.

10. A thin sheet according to claim 9, wherein the second bonding region includes at least one of the bridge means, and further includes at least a portion of the electrode region.

11. A thin sheet according to claim 1, wherein the electrode region is preformed into corrugations that extend out of a plane formed by the frame region.

12. A thin sheet according to claim 1, wherein the electrode region is preformed into flaps that extend out of the plane formed by the frame region.

13. A thin sheet according to claim 1, wherein the electrode region is preformed into curved portions that extend out of the plane formed by the frame region.

14. A thin sheet according to claim 1, further comprising one or more electrical contacts positioned on the first major surface of the frame region.

15. A thin sheet according to claim 14, further comprising one or more conducting traces for electrically connecting the one or more electrical contacts to the one or more of the electrodes of the electrode region.

16. A thin sheet according to claim 15, wherein the one or more conducting traces extend across one or more of the bridge means.

17. A thin sheet according to claim 16, wherein the one or more electrical contacts are located in the first bonding region.

18. A thin sheet according to claim 14, further comprising one or more vias that extend through the frame region.

19. A thin sheet according to claim 1, further comprising one or more electrical contacts positioned on the second major surface of the frame region.

20. A thin sheet according to claim 19, further comprising one or more conducting traces for electrically connecting the one or more electrical contacts to one or more of the conductive electrodes of the electrode region.

21. A thin sheet according to claim 20, wherein the one or more conducting traces extend across one or more of the bridge means.

22. A thin sheet according to claim 21, wherein the one or more electrical contacts are located in the second bonding region.

23. A microactuator array device, comprising:

a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells;

thin conductive and dielectric films deposited on said sheets to form a plurality of electrodes associated with said array of unit cells; and

a protective package surrounding said sheets, said protective package mechanically coupled to selected sheets via one or more bridge means.

24. A device according to claim 23, wherein the protective package comprises a plurality of generally parallel thin flexible polymer sheets that are bonded together to form a frame region, the frame region having an inner perimeter that is spaced from the outer perimeter of the array of unit cells.

25. A device according to claim 24, wherein selected polymer sheets of the frame region include one or more contacts and/or one or more vias for providing an electrical connection between adjacent polymer sheets.

26. A device according to claim 25, further comprising one or more conducting traces for electrically connecting the one or more contacts and/or one or more vias of the frame region to selected electrodes associated with said array of unit cells.

27. A device according to claim 26, wherein the one or more conducting traces extend across one or more of the bridge means.

28. A microactuator device with integral protective package, comprising:

plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells;

selected ones of the polymer sheets including;

an electrode region having an outer perimeter;

a frame region having a first major surface and a second major surface, the frame region extending around and spaced from the outer perimeter of the electrode region; and

one or more bridges for connecting the electrode region to the frame region.

29. A device according to claim 28, wherein the selected polymer sheets further include:

a first bonding region extending along at least a portion of the first major surface of the frame region; and

a second boding region extending along at least a portion of the second major surface of the frame region.

30. A device according to claim 29, wherein the first bonding region and the second bonding region of adjacent polymer sheets are substantially aligned with one another.

31. A device according to claim 29, wherein the frame region of selected polymer sheets include one or more vias for providing an electrical connection through the polymer sheet.

32. A device according to claim 29, wherein the frame region of selected polymer sheets include one or more contacts for providing an electrical connection between polymer sheet.