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Microactuator array with integrally formed package

  • US 6,411,013 B1
  • Filed: 12/30/1999
  • Issued: 06/25/2002
  • Est. Priority Date: 12/30/1999
  • Status: Expired due to Fees
First Claim
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1. A thin sheet for use in a microactuator device, comprising:

  • an electrode region situated on or in the thin sheet, the electrode region having an outer perimeter and at least one conductive electrode;

    a frame region having a first major surface and a second major surface, the frame region extending around and spaced from the outer perimeter of the electrode region;

    one or more bridge means for connecting the electrode region to the frame region;

    a first bonding region extending along at least a portion of the first major surface of the frame region; and

    a second boding region extending along at least a portion of the second major surface of the frame region.

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