Multiple piezoelectric transducer array

• US 6,411,015 B1
• Filed: 05/09/2000
• Issued: 06/25/2002
• Est. Priority Date: 05/09/2000
• Status: Expired due to Term

• Current Assignee: Measurement Specialties, Inc. (France) (TE Connectivity Limited)
• Original Assignee: Measurement Specialties, Inc. (France) (TE Connectivity Limited)
• Inventors: Toda, Minoru
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US09/567,385
• Time in Patent Office: 777 Days
• Field of Search: 310/800, 310/334, 310/367, 310/369, 310/330
• US Class Current: 310/334
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: Y10S 310/80 Piezoelectric polymers, e.g. PVDF

Abstract

A multiple transducer array structure comprises a single piezoelectric film material having a plurality of alternately shaped concave and convex regions and responsive to an energy signal incident thereon, the alternating concave and convex regions each having a given radius, each of the regions integrally formed with another of the regions, each of the concave and convex regions vibrating in response to the energy signal with opposite phase to cause the transducer to operate at a given resonant frequency determined by the average radius of the regions. A method of forming the corrugated transducer is also disclosed.

Claims

1. A transducer comprising:

a piezoelectric film comprising a plurality of alternating concave and convex regions;

first and second electrodes disposed respectively on a top surface and a bottom surface of said piezoelectric film;

said piezoelectric film responsive to a first signal incident thereon to cause each of said concave and convex regions to vibrate with opposite phase to cause said transducer to operate at a given frequency, wherein said alternating concave and convex regions have different radii.

2. The transducer array of claim 1, wherein said given frequency is a resonant frequency.

3. The transducer array of claim 1, wherein a stationary position is defined between each said concave and convex region due to cancellation of opposite motion associated with said respective concave and convex regions.

4. The transducer of claim 1, further comprising a substrate disposed beneath said piezoelectric film, said substrate having a plurality of projections in alignment with at least some of said concave regions for supporting said film.

5. The transducer of claim 1, wherein said alternating concave and convex regions are integrally formed.

6. The transducer of claim 1, wherein said film is bonded to a substrate at least some of said convex regions.

7. The transducer of claim 1, wherein said piezoelectric material is PVDF.

8. The transducer of claim 1, wherein the distance between said alternating concave and convex regions is periodic in at least one dimension.

9. The transducer of claim 1, wherein the distance in height between each said alternating concave and convex region is approximately one half wavelength of the acoustic wave output from the transducer.

10. A transducer comprising:

a single piezoelectric film material having a top surface on which is disposed a first electrode, and a bottom surface on which is disposed a second electrode, said piezoelectric film material having a plurality of alternately shaped concave and convex regions, said alternating concave and convex regions each having a given radius, each of said regions integrally formed with another of said regions, each of said concave and convex regions vibrating with opposite phase in response to a first signal incident thereon to cause said transducer to generate an output signal at a given resonant frequency in accordance with the radii of said concave and convex regions, wherein each said concave and convex region differs in height by approximately one half of the wavelength of the output signal.

11. The transducer array of claim 10, wherein sad piezoelectric material comprises PVDF.

12. The transducer of claim 10, wherein the piezoelectric material is curved into an arcuate surface to control output signal direction.

13. The transducer of claim 12, wherein the arcuate surface is cylindrical.

14. The transducer according to claim 10, further comprising

a substrate having a first planar portion on which a first part of said film material is disposed, a second planar portion opposite said first planar portion on which a second part of said film material is disposed, and a cavity portion intermediate said first and second planar portions and spanned by said film material.

15. A corrugated transducer apparatus comprising:

a piezoelectric film comprising a plurality of corrugations defined by alternating peaks and valleys of a periodic nature in a given dimension,

a substrate;

said film secured only at a first end to a first portion of said substrate, and at a second end to a second portion of said substrate, first and second electrodes uniformly disposed on a top surface and a bottom surface of said film, respectively, wherein said alternating peaks and valleys differ in height by a predetermined amount sufficient to cause vibration signals of said alternating peaks and valleys in response to a first signal incident thereon to be in opposite phase, thereby constructively adding to one another to generate an amplified output signal at a resonant frequency.

16. The transducer of claim 15, wherein said predetermined amount is an odd integer number of half wavelengths.

17. The transducer of claim 15 wherein said film is cylindrically-shaped and having a diameter D, and wherein the resonant frequency of the output signal is independent of the diameter of the cylinder.

18. A transducer comprising:

a piezoelectric film comprising a plurality of alternating concave and convex regions;

first and second electrodes disposed respectively on a top surface and a bottom surface of said piezoelectric film;

a substrate disposed beneath said piezoelectric film, said substrate having a plurality of projections in alignment with at least some of said concave regions for supporting said film;

wherein said piezoelectric film responsive to a first signal incident thereon to cause each of said concave and convex regions to vibrate with opposite phase to cause said transducer to operate at a given frequency.

19. A piezoelectric element comprising:

a single piezoelectric layer of a given length and width and deformable in response to a voltage applied thereto, said single piezoelectric layer shaped into a series of alternating convex and concave regions;

a first electrode uniformly disposed on a top surface of said piezoelectric layer, and a second electrode uniformly disposed on a bottom surface of said piezoelectric layer, said first electrode defining an exposed portion about a peripheral region of said piezoelectric layer;

first and second metal layers disposed opposite one another and coupled to the piezoelectric layer along the length of the peripheral region of said top surface for maintaining said concave and convex shape and for electrically coupling to a voltage source for applying said voltage across said first and second electrodes during operation to cause said concave and convex regions to vibrate to generate an output signal,

wherein each said concave and convex region differs in height by approximately one half of the wavelength of the output signal to cause said concave and convex regions to vibrate with opposite phase, thereby constructively adding to one another to generate said output signal at a resonant frequency.