Apparatuses and methods for determining if protective coatings on semiconductor substrate holding devices have been compromised

• US 6,411,110 B1
• Filed: 08/17/1999
• Issued: 06/25/2002
• Est. Priority Date: 08/17/1999
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Gilton, Terry
• Primary Examiner(s): Le, N.
• Assistant Examiner(s): Hamdan, Wasseem H.
• Application Number:
  US09/375,879
• Publication Number:
  US 20020070737A1
• Time in Patent Office: 1,043 Days
• Field of Search: 324/718, 324/671, 324/501, 324/537, 324/753, 324/96, 324/750, 324/450, 324/541, 324/544, 324/551, 324/557, 324/693, 733/04.R, 73/49
• US Class Current: 324/718
• CPC Class Codes: G01N 27/205 in insulating materials

Abstract

In one aspect, the invention includes an apparatus comprising a semiconductor substrate receiving device with at least one extension configured to hold a semiconductor substrate within a liquid bath. The device is configured to have at least a portion of the extension at least periodically placed within the liquid bath. The extension comprises a conductive material at least partially coated with an insulative protective material. The insulative protective material is configured to protect the portion of the conductive material which is in the bath from physically contacting the liquid of the bath. The apparatus also comprises an electrode within the bath, and an electrical connection between the electrode and the conductive material of the extension. Additionally, the apparatus comprises a monitor configured to monitor a current flow state of a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is in a closed state or in an open state. In another aspect, the invention includes methods for determining if a protective coating on a semiconductor substrate receiving device has been compromised.

Claims

1. An apparatus configured to determine if a protective coating on a semiconductor substrate receiving device has been compromised, a comprising:

the semiconductor substrate receiving device, the device having at least one extension configured to hold a semiconductor substrate within a liquid bath, the device being configured to have at least a portion of the extension at least periodically within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is in the bath from physically contacting the liquid of the bath;

an electrode within the bath;

an electrical connection between the electrode and the conductive material of the extension; and

a monitor configured to monitor a current flow state of a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is in a closed state or in an open state;

the state of the circuit being different if the protective material is compromised than if the protective material is not compromised.

2. The apparatus of claim 1 comprising at least two of the receiving devices.

3. The apparatus of claim 1 comprising at least two of the receiving devices, the circuitry being configured to indicate which of the at least two receiving devices has had its protective coating compromised.

4. The apparatus of claim 1 further comprising a circuit-state indicator in electrical connection with the monitor and configured to be different when the circuit is in an open state than when the circuit is in a closed state.

5. The apparatus of claim 1 further comprising an alarm in electrical connection with the monitor and configured to change from a non-triggered state to a triggered state if the circuit changes from being in the open state to being in the closed state.

6. The apparatus of claim 1 wherein the circuit comprises a power of less than or equal to about 24 volts.

7. The apparatus of claim 1 wherein the circuit comprises a power of less than or equal to about 24 volts and a direct current power source.

8. An apparatus configured to determine if a protective coating on the semiconductor substrate lifting device has been compromised, comprising:

the semiconductor substrate lifting device, the device having at least one extension configured to move a semiconductor substrate relative to a liquid bath, the device being configured to periodically place at least a portion of the extension within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is periodically placed in the bath from physically contacting the liquid of the bath;

an electrode within the bath;

an electrical connection between the electrode and the conductive is material of the extension; and

a monitor configured to monitor a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is closed and enables a predetermined current flow or open and does not enable the predetermined current flow;

the circuit being open unless the protective material is sufficiently compromised.

9. The apparatus of claim 8 comprising at least two of the lifting devices.

10. The apparatus of claim 8 comprising at least two of the lifting devices, the circuitry being configured to indicate which of the at least two lifting devices has had its protective coating compromised.

11. The apparatus of claim 8 further comprising a circuit-state indicator in electrical connection with the monitor and configured to be different when the circuit is open than when the circuit is closed.

12. The apparatus of claim 8 further comprising an alarm in electrical connection with the monitor and configured to change from a non-triggered state to a triggered state if the circuit changes from being open to being closed.

13. The apparatus of claim 8 wherein the circuit comprises a power of less than or equal to about 24 volts.

14. The apparatus of claim 8 wherein the circuit comprises a power of less than or equal to about 24 volts and a direct current power source.

15. A method for determining if a protective coating on a semiconductor substrate receiving device has been compromised, comprising:

providing a semiconductor substrate receiving device, the device having at least one extension configured to hold a semiconductor substrate within a liquid bath, the device being configured to have at least a portion of the extension at least periodically within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is in the bath from physically contacting the liquid of the bath;

providing an electrode within the bath;

providing an electrical connection between the electrode and the conductive material of the extension; and

monitoring a current flow state of a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is in a closed state or in an open state;

the state of the circuit being different if the protective material is compromised than if the protective material is not compromised.

16. The method of claim 15 comprising providing at least two of the receiving devices.

17. The method of claim 15 comprising providing at least two of the receiving devices, the circuitry being configured to indicate which of the at least two receiving devices has had its protective coating compromised.

18. The method of claim 15 further comprising providing a circuit-state indicator in electrical connection with the monitor and configured to be different when the circuit is open than when the circuit is closed.

19. The method of claim 15 further comprising providing an alarm in electrical connection with the monitor and configured to change from a non-triggered state to a triggered state if the circuit changes from being open to being closed.

20. A method for determining if a protective coating on a semiconductor substrate receiving device has been compromised, comprising:

providing a semiconductor substrate receiving device, the device having at least one extension configured to move a semiconductor substrate relative to a liquid bath, the device being configured to periodically place at least a portion of the extension within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is periodically placed in the bath from physically contacting the liquid of the bath;

providing an electrode within the bath;

providing an electrical connection between the electrode and the conductive material of the extension; and

monitoring a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is closed and accordingly enabling for a current flow, or open and not enabling for the current flow;

the circuit being open unless the protective material is compromised.

21. The method of claim 20 comprising providing at least two of the receiving devices.

22. The method of claim 20 comprising providing at least two of the receiving devices, the circuitry being configured to indicate which of the at least two receiving devices has had its protective coating compromised.

23. The method of claim 20 further comprising providing a circuit-state indicator in electrical connection with the monitor and configured to be different when the circuit is open than when the circuit is closed.

24. The method of claim 20 further comprising providing an alarm in electrical connection with the monitor and configured to change from a non-triggered state to a triggered state if the circuit changes from being open to being closed.

25. An apparatus configured to determine if a protective coating on a semiconductor substrate receiving device has been compromised, comprising:

the semiconductor substrate receiving device, the device having at least one extension having a curved terminal end configured to hold a semiconductor substrate within a liquid bath, the device being configured to have at least a portion of the extension at least periodically within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is in the bath from physically contacting the liquid of the bath;

an electrode within the bath;

an electrical connection between the electrode and the conductive material of the extension; and

a monitor configured to monitor a current flow state of a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is in a closed state or in an open state;

the state of the circuit being different if the protective material is compromised than if the protective material is not compromised.

26. The apparatus of claim 25 comprising at least two of the receiving devices.

27. The apparatus of claim 25 comprising at least two of the receiving devices, the circuitry being configured to indicate which of the at least two receiving devices has had its protective coating compromised.

28. The apparatus of claim 25 further comprising a circuit-state indicator in electrical connection with the monitor and configured to be different when the circuit is in an open state than when the circuit is in a closed state.

29. The apparatus of claim 25 further comprising an alarm in electrical connection with the monitor and configured to change from a non-triggered state to a triggered state if the circuit changes from being in the open state to being in the closed state.

30. The apparatus of claim 25 wherein the circuit comprises a power of less than or equal to about 24 volts.

31. The apparatus of claim 25 wherein the circuit comprises a power of less than or equal to about 24 volts and a direct current power source.

32. An apparatus configured to determine if a protective coating on the semiconductor substrate lifting device has been compromised, comprising:

the semiconductor substrate lifting device, the device having at least one extension having a terminal end forming a hook, the device configured to move a semiconductor substrate relative to a liquid bath, the device being configured to periodically place at least a portion of the extension within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is periodically placed in the bath from physically contacting the liquid of the bath;

an electrode within the bath;

an electrical connection between the electrode and the conductive material of the extension; and

a monitor configured to monitor a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is closed and enables a predetermined current flow or open and does not enable the predetermined current flow;

the circuit being open unless the protective material is sufficiently compromised.

33. A method for determining if a protective coating on a semiconductor substrate receiving device has been compromised, comprising:

providing a semiconductor substrate receiving device, the device having at least one extension configured to hold a semiconductor substrate within a liquid bath, the device being configured to have at least a portion of the extension at least periodically within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is in the bath from physically contacting the liquid of the bath, the receiving device discrete from the semiconductor substrate;

providing an electrode within the bath;

providing an electrical connection between the electrode and the conductive material of the extension; and

monitoring a current flow state of a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is in a closed state or in an open state;

the state of the circuit being different if the protective material is compromised than if the protective material is not compromised.

34. A method for determining if a protective coating on a semiconductor substrate receiving device has been compromised, comprising:

providing a semiconductor substrate receiving device, the device having at least one extension configured to move a semiconductor substrate relative to a liquid bath, the device being configured to periodically place at least a portion of the extension within the liquid bath, the extension comprising a conductive material at least partially coated with an insulative protective material, the insulative protective material being configured to protect the portion of the conductive material which is periodically placed in the bath from physically contacting the liquid of the bath, the receiving device discrete from the semiconductor substrate;

providing an electrode within the bath;

providing an electrical connection between the electrode and the conductive material of the extension; and

monitoring a circuit comprising the electrode, conductive material of the extension, and liquid bath to determine if the circuit is closed and accordingly enabling for a current flow, or open and not enabling for the current flow;

the circuit being open unless the protective material is compromised.