System for regulating the temperature of IC-chips with a fluid which is heated and cooled as a function of the fluid temperatures to and from heat exchangers for the IC-chips

• US 6,412,551 B1
• Filed: 05/19/2000
• Issued: 07/02/2002
• Est. Priority Date: 05/19/2000
• Status: Active Grant

• Current Assignee: Delta Design Incorporated (COHU Incorporated)
• Original Assignee: Unisys Corporation
• Inventors: Babcock, James Wittman, Tustaniwskyj, Jerry Ihor
• Primary Examiner(s): CIRIC, LJILJANA V
• Application Number:
  US09/574,784
• Time in Patent Office: 774 Days
• Field of Search: 165/264, 165/265, 165/80.4, 165/299, 165/300, 165/263, 165/294, 219/494, 621/13, 625/13
• US Class Current: 165/264
• CPC Class Codes: G05D 23/1393 characterised by the use of electric means
• CPC Class Codes: G05D 23/1919 characterised by the type of controller
• CPC Class Codes: G05D 23/1931 to control the temperature of one space

Abstract

A temperature control system comprises a reservoir that is holding a hot fluid; a heat exchanger, for an electronic component, coupled to an input conduit that carries the hot fluid from the reservoir into the heat exchanger; an output conduit coupled to the heat exchanger, that carries the hot fluid from the heat exchanger back to the reservoir; a first temperature sensor, coupled to the input conduit; and a second temperature sensor, coupled to the output conduit. A heater is coupled to the output conduit which adds heat to the hot fluid in the output conduit in response to a heater control signal; and a cooler is coupled to the reservoir which adds cold fluid to the reservoir in response to a cooler control signal. A temperature controller generates the heater control signal and the cooler control signal as respective functions of both sensed temperatures.

Claims

1. A temperature control system, comprising:

a reservoir that is holding a hot fluid;

a heat exchanger adapted to contact an electronic component, said heat exchanges being coupled to an input conduit that carries said hot fluid from said reservoir into said heat exchanger; and

an output conduit which is coupled to said heat exchanger, said output conduct carrying said hot fluid from said heat exchanger back to said reservoir;

a first sensor, coupled to said input conduit, having a signal terminal which generates an input temperature signal that indicates the temperature of said hot fluid flowing into said heat exchanger;

a second sensor, coupled to said output conduit, having a signal terminal which generates an output temperature signal that indicates the temperature of said hot fluid flowing out of said heat exchanger;

a heater, coupled to said output conduit, having a control input that receives a heater control signal and, in response thereto, adds heat to said hot fluid that is returning back to said reservoir in said output conduit;

a cooler, coupled to said reservoir, having a control input that receives a cooler control signal and, in response thereto, adds a cold fluid to said hot fluid in said reservoir; and

,

a temperature controller having input terminals that receive said input temperature signal and said output temperature signal, and having an electronic circuit that generates said heater control signal and said cooler control signal as respective functions of both said temperature of said hot fluid flowing into said heat exchanger and said temperature of said hot fluid flowing out of said heat exchanger.

2. A system according to claim 1 wherein said heater control signal directs said heater to add said heat to said fluid returning to said reservoir when a set point exceeds said temperature of said fluid flowing into said heat exchanger, and when said set point exceeds said temperature of said fluid flowing out of said heat exchanger.

3. A system according to claim 1 wherein said cooler control signal directs said cooler to add said cold fluid to said reservoir when said temperature of said fluid flowing into said heat exchanger exceeds a set point, and when said temperature of said fluid flowing out of said heat exchanger exceeds said temperature of said fluid flowing into said heat exchanger.

4. A system according to claim 1 wherein said cooler control signal directs said cooler to add said cold fluid to said reservoir when said temperature of said fluid flowing into said heat exchanger exceeds a set point, and when said temperature of said fluid flowing out of said heat exchanger exceeds said set point.

5. A system according to claim 1 wherein said heater control signal directs said heater to add said heat to said fluid returning to said reservoir, and said cooler control signal directs said cooler to add said cold fluid to said reservoir, in three operating modes which are selected based on the value of said temperature of said fluid flowing into said heat exchanger relative to a set point.

6. A system according to claim 1 wherein said heater control signal directs said heater to add said heat to said fluid returning to said reservoir in proportion to the magnitude of K₁e_OUT1 plus K₂e_IN plus K₃d(e_IN)/dt plus K₄∫

e_IN and said cooler control signal directs said cooler to add said cold fluid to said reservoir in proportion to the magnitude of K₅e_OUT2 plus K₆e_IN plus K₇d(e_IN)/dt plus K₈∫

e_IN;

where e_IN is an error in said input temperature, e_OUT1 and e_OUT2 are respective errors in said output temperatures, and K₁ thru K₈ are constants.

7. A system according to claim 1 which further includes rapid cool-down valves, coupled to said hot fluid circuit, which receives electrical control signals and in response a) blocks the flow of said hot fluid into said heat exchanger and from said heat exchanger back to said reservoir, and, b) passes said cold fluid through said heat exchanger while the flow of said hot fluid is blocked.

8. A system according to claim 1 wherein said cooler includes a cold fluid circuit which operates in parallel with said hot fluid circuit to maintain said cold fluid at a cold temperature.

9. A system according to claim 1 wherein said heater responds to said heater control signal with a fast response time;

said cooler responds to said cooler control signal with a slow response time; and

to compensate for said slow response time, said cooler control signal directs said cooler to add said cold fluid to said reservoir while said heater control signal directs said heater to concurrently add varying amounts of heat to said fluid returning to said reservoir.

10. A system according to claim 1 wherein said heat exchanger includes a jacket which has a face that moves and can mate with a corresponding face on packaged integrated circuit chips.

11. A system according to claim 1 wherein said heat exchanger includes a jacket which has a face that moves and can mate with a corresponding face on unpackaged integrated circuit chips.