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Abrading plate and polishing method using the same

  • US 6,413,149 B1
  • Filed: 12/23/1999
  • Issued: 07/02/2002
  • Est. Priority Date: 04/28/1998
  • Status: Expired due to Fees
First Claim
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1. An abrading plate for polishing an object to produce a flat and mirror surface thereon, said abrading plate comprising:

  • abrasive particles having a particle size of less than two micrometers, a chemical purity of more than 90%, and a Na concentration of below 100 ppm;

    a binder material; and

    a porosity;

    wherein a ratio of said abrasive particles and said binder material is 1;

    x, where x is not less than 0.5 by volume, and said abrasive particles, said binder material and said porosity are in a proportion such that said abrasive particles are not less than 10% by volume, said binder material is not more than 60% by volume, and said porosity is 10˜

    40% by volume.

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