Magnetic polishing fluids
First Claim
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1. A magnetic polishing fluid composition comprising:
- colloidal size magnetic particles, wherein said magnetic particles have a mean particle size range from about 0.01 μ
m to about 0.15 μ
m;
colloidal size polishing particles, wherein said polishing particles have a mean particle size range from about 0.01 μ
m to about 0.1 μ
m;
at least one stabilizer for stabilizing said colloidal-size particles, wherein said stabilizer is an alkylated ammonium hydroxide; and
a carrying fluid;
wherein the pH of said composition is greater than 9 to about 12.
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Abstract
Magnetic polishing fluid compositions comprising various size colloidal and/or non-colloidal magnetic particle and colloidal size polishing particle compositions suitable for polishing ceramic and glass substrates are described. The compositions are usually aqueous compositions having highly basic pHs. Methods for preparing the various polishing fluids compositions are also discussed.
40 Citations
70 Claims
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1. A magnetic polishing fluid composition comprising:
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colloidal size magnetic particles, wherein said magnetic particles have a mean particle size range from about 0.01 μ
m to about 0.15 μ
m;
colloidal size polishing particles, wherein said polishing particles have a mean particle size range from about 0.01 μ
m to about 0.1 μ
m;
at least one stabilizer for stabilizing said colloidal-size particles, wherein said stabilizer is an alkylated ammonium hydroxide; and
a carrying fluid;
wherein the pH of said composition is greater than 9 to about 12. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
said colloidal-size magic particles comprise colloidal-size Fe3O4 particles having a weight percent content ranging from about 20 to about 55 wt % of said composition;
said colloidal-size polishing particles, comprise colloidal-size SiO2 particles having a weight percent content ranging from about 1 to about 20 wt. % of said composition;
said at least one stabilize comprises tetramethylammonium hydroxide, said hydroxide having a weight percent content ranging from about 0.05 to about 25 wt. % of said composition; and
said carrying fluid, adjusted to a pH greater than 9 to about 12, comprising any remaining weight percent of said composition.
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13. A composition according to claim 1 wherein said colloidal-size magnetic particles, said colloidal-size polishing particles and said at least one stabilizer have weight percents of said composition ranging from about 20 to about 55 wt. %, from about 1 to about 20 wt. %, and from 0.05 to about 25 wt. %, respectively.
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14. A composition according to claim 1 wherein said colloidal-size magnetic particles, said colloidal-size polishing particles and said at least one stabilizer have weight percents of said composition ranging from about 25 to about 35 wt %, from about 3 to about 15 wt. % and from about 1 to about 8 wt. %, respectively.
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15. A method for preparing a composition according to claim 1, said method comprising the steps of:
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preparing a dispersion of colloidal-size magnetic particles with a stabilizer in a carrying fluid;
preparing a dispersion of colloidal-size polishing particles in a carrying fluid; and
mixing said colloidal-size magnetic particle dispersion and said colloidal-size polishing particle dispersion to form a mixture.
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16. A method for preparing a composition according to claim 15, further comprising adjusting the pH of said mixture to greater than 9 to about 12.
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17. A method according to claim 15 further comprising the step of mixing said carrying fluid with said stabilizer prior to the first preparing step.
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18. A magnetic polishing fluid composition comprising:
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colloidal and non-colloidal magnetic particles, wherein said non-colloidal magnetic particles have a mean particle size range from about 0.15 μ
m to about 3.0 μ
m and said colloidal magnetic particles have a mean particle size range from about 0.01 μ
m to about 0.15 μ
m;
colloidal-size polishing particles, wherein said polishing particles have a mean particle size range from about 0.01 μ
m to about 0.1 μ
m;
at least one stabilizer for stabilizing said colloidal-size particles;
an additive for adjusting viscosity, and a carrying fluid;
wherein the pH of said composition is greater than 9 to about 12. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
said non-colloidal size magnetic particles is selected from a group consisting of carbonyl iron and magnetite particles, said particles having a weight percent content from about 21 to about 38.5 wt %;
said colloidal-size magnetic particles comprising colloidal-size magnetite particles, said particles having a weight percent content from about 3 to about 7.5 wt %;
said colloidal-size polishing particles comprising colloidal-size silica particles, said particles having a weight percent content from about 1 to about 10 wt. %;
said at least one stabilizer comprising tetramethylammonium hydroxide, said hydroxide having a weight percent content from about 0.5 to about 10 wt. %;
said viscosity adjusting additive comprising polyethylene glycol, said glycol having a weight percent content from about 0.1 to about 5 wt. %; and
said fluid adjusted to a pH greater than 9 to about 12, comprising any remaining wt % of said composition.
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39. A composition according to claim 38 further comprising additives selected from among the group of ammonium molybdate, zirconium sulfite, cerium hydroxide and zinc salts in a weight percent ranging from about 0.5 to about 4.5 wt. % of the composition.
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40. A composition according to claim 18 wherein said non-colloidal size magnetic particles, said colloidal-size magnetic particles, said colloidal-size polishing particles, said at least one stabilizer and said viscosity additive have weight percent contents in said composition ranging from about 21 to about 38.5 wt. %, from about 3 to about 7.5 wt. %, from about 1 to about 10 wt. %, from about 0.5 wt. % to about 10 wt. % and from 0.1 to about 5 wt. %, respectively.
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41. A composition according to claim 18 wherein said non-colloidal size magnetic particles, sad colloidal-size magnetic particles, said colloidal-size polishing particles, said at least one stabilizer and said viscosity additive have weight percent contents in said composition from about 25 to about 28 wt. %, from about 3.75 to about 5.25 wt. %, from about 3 to about 5 wt. %, from about 0.5 to about 5 wt. % and from about 1 to about 5 wt. %, respectively.
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42. A method for producing a composition according to claim 18, said method comprising the steps of:
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preparing a dispersion of non-colloidal size magnetic particles by adding said particles to a mixture of a viscosity additive in a carrying fluid;
preparing a dispersion of colloidal-size magnetic particles with a stabilizer in a carrying fluid;
preparing a dispersion of colloidal-size polishing particles in a carrying fluid;
mixing sad colloidal-size magnetic particle dispersion and said colloidal-size polishing particle dispersion to form an intermediate mixture; and
mixing said intermediate mixture with said non-colloidal size magnetic particle dispersion.
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43. A method for producing a composition according to claim 42, further comprising adjusting the pH of said composition to a pH greater than 9 to about 12.
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44. A method according to claim 42 further comprising the step of mixing a viscosity additive in a carrying fluid prior to the first preparing step.
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45. A method according to claim 42 futher comprising the step of mixing a stabilizer in a carrying fluid prior to the preparing steps.
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46. A method according to claim 42 wherein the first mixing step comprises mixing said non-colloidal magnetic particle dispersion with said colloidal polishing particle dispersion to form an intermediate mixture and the second mixing step comprises mixing said intermediate mixture with said colloidal magnetic particle dispersion.
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47. A method according to claim 43 further comprising the step of adding to the polishing particle dispersion additives to enhance the rate and quality of polishing, said adding step being effected prior to the first mixing step.
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48. A magnetic polishing fluid composition comprising:
-
non-colloidal magnetic particles, wherein said magnetic particles have a mean particle size range from about 0.15 μ
m to about 3.0 μ
m;
colloidal size polishing particles, said polishing particles have a mean particle size range from about 0.01 μ
m to about 0.1 μ
m;
at least one stabilizer for stabilizing said colloidal particles;
an additive for adjusting viscosity; and
a carrying fluid;
wherein the pH of said composition is greater than 9 to about 12. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70)
said non-colloidal magnetic particles comprise carbonyl iron particles, said particles having a weight percent content in said composition from about 20 to about 55 wt. %;
said colloidal-size polishing particles comprise colloidal-size silica particles, said particles having a weight percent content in said composition from about 1 to about 20 wt. %;
said at least one stabilizer comprises tetramethylammonium hydroxide, said hydroxide having a weight percent content in said composition ranging from about 0.5 to about 25 wt. %;
said additive for adjusting viscosity comprises polyethylene glycol, said glycol having a weight percent content in said composition ranging from about 0.1 to about 10 wt. %; and
said carrying fluid, adjusted to a pH greater than 9 to about 12, comprising any remaining wt. % of said composition.
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65. A composition according to claim 48 wherein said non-colloidal magnetic particles, said colloidal-size polishing particles, said at least one stabilizer and said viscosity additive have weight percent contents in said composition ranging from about 20 to about 55 wt. %, from about 1 to about 20 wt. %, from about 0.5 wt % to about 25 wt % and from about 0.1 wt % to about 10 wt. %, respectively.
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66. A composition according to claim 48 wherein said non-colloidal magnetic particles, said colloidal-size polishing particles, said at least one stabilizer and said viscosity additive have weight percent contents in said composition ranging from about 25 to about 35 wt %, from about 3 to about 5 wt. %, from about 1 wt. % to about 8 wt % and from about 1 wt % to about 5 wt %, respectively.
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67. A method for producing a composition according to claim 48, said method comprising the steps of:
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preparing a dispersion of non-colloidal magnetic particles by adding said particles to a viscosity additive in a carrying fluid;
preparing a colloidal-size polishing particle dispersion with a stabilizer in a carrying fluid; and
mixing said dispersion of non-colloidal magnetic particles and said dispersion of colloidal-size polishing particles.
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68. A method for producing a composition according to claim 67, further comprising adjusting the pH of the mixture to a pH greater than 9 to about 12.
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69. A method according to claim 67 further comprising the step of mixing a viscosity additive in a carrying fluid prior to the first preparing step.
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70. A method according to claim 67 further comprising the step of mixing a stabilizer in a carrying fluid prior to the second preparing step.
Specification
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Current AssigneeMPM Corporation
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Original AssigneeMPM Corporation
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InventorsLevin, Ludmila
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Primary Examiner(s)KOSLOW, CAROL M
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Application NumberUS09/563,917Time in Patent Office789 DaysField of Search252/62.52, 513/07, 513/08, 513/09, 451/36, 451/37, 451/35US Class Current252/62.52CPC Class CodesB24B 1/005 using a magnetic polishing ...C03C 19/00 Surface treatment of glass,...C09G 1/02 containing abrasives or gri...C09K 3/1463 Aqueous liquid suspensionsH01F 1/44 of magnetic liquids, e.g. f...H01L 21/3212 by chemical mechanical poli...
