Angular velocity sensor
First Claim
1. An angular velocity sensor in which a Coriolis force is generated, comprising:
- a supporting substrate;
a support beam-fixing portion disposed in the supporting substrate;
a first supporting beam connected to the support beam fixing portion;
a first oscillator supported with the first supporting beam for oscillatory movement in a first direction, the first supporting beam having opposed ends and a longitudinally intermediate portion and extending at least in a direction orthogonal to the first direction, the opposed ends of the first supporting beam being connected to the first oscillator and the longitudinally intermediate portion of the first supporting beam being joined to the support beam-fixing portion;
a second supporting beam connected to the first oscillator;
a second oscillator supported by the second supporting beam for oscillatory displacement in a second direction, the second oscillator being displaced in said second direction in response to a Coriolis force being generated;
driving means for oscillating the first oscillator in the first direction; and
detecting means for detecting the displacement of the second oscillator when the Coriolis force is generated.
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Accused Products
Abstract
An angular velocity sensor according to an embodiment of the present invention includes: a supporting substrate; a support-fixing portion disposed in the supporting substrate; a first supporting beam connected to the support-fixing portion; a first oscillator supported with the first supporting beam; a second supporting beam connected to the first oscillator; a second oscillator supported with the second supporting beam oscillating in the direction that a Coriolis force is generated; driving electrodes for driving the first oscillator and the second oscillator in a predetermined direction; and detecting electrodes for detecting the displacement of the second oscillator caused by the Coriolis force applied to the second oscillator, wherein the first supporting beam extends at least in the direction orthogonal to the oscillating direction of the first oscillator, both ends of the first supporting beam being connected to the first oscillator, and a longitudinally intermediate portion of the first supporting beam being joined to the support-fixing portion.
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Citations
14 Claims
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1. An angular velocity sensor in which a Coriolis force is generated, comprising:
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a supporting substrate;
a support beam-fixing portion disposed in the supporting substrate;
a first supporting beam connected to the support beam fixing portion;
a first oscillator supported with the first supporting beam for oscillatory movement in a first direction, the first supporting beam having opposed ends and a longitudinally intermediate portion and extending at least in a direction orthogonal to the first direction, the opposed ends of the first supporting beam being connected to the first oscillator and the longitudinally intermediate portion of the first supporting beam being joined to the support beam-fixing portion;
a second supporting beam connected to the first oscillator;
a second oscillator supported by the second supporting beam for oscillatory displacement in a second direction, the second oscillator being displaced in said second direction in response to a Coriolis force being generated;
driving means for oscillating the first oscillator in the first direction; and
detecting means for detecting the displacement of the second oscillator when the Coriolis force is generated. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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2. An angular velocity sensor in which a Coriolis force is generated, comprising:
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a supporting substrate;
a support beam-fixing portion disposed in the supporting substrate;
a first supporting beam connected to the support-fixing portion;
a first oscillator supported with the first supporting beam for oscillatory movement in a first direction, the first supporting beam having opposed ends and a longitudinally intermediate portion and extending at least in a direction orthogonal to the first direction, the opposed ends of the first supporting beam being connected to the first oscillator, and the longitudinally intermediate portion of the first supporting beam being joined to the support beam-fixing portion;
a second supporting beam connected to the first oscillator;
a second oscillator supported by the second supporting beam for oscillatory displacement in a second direction, the second oscillator being displaced in said second direction in response to a Coriolis force being generated;
driving elements for oscillating the first oscillator in the first direction; and
detecting elements for detecting the displacement of the second oscillator when the Coriolis force is generated.
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Specification