Method and apparatus for marking and identifying a defective die site

• US 6,415,977 B1
• Filed: 08/30/2000
• Issued: 07/09/2002
• Est. Priority Date: 08/30/2000
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Rumsey, Brad D.
• Primary Examiner(s): Pitts, Harold I.
• Application Number:
  US09/650,796
• Time in Patent Office: 678 Days
• Field of Search: 235/454, 235/464, 235/494
• US Class Current: 235/454
• CPC Class Codes: H01L 21/67282 Marking devices
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like
• CPC Class Codes: H01L 2223/5442 comprising non digital, non alphanumeric information, e.g. symbols
• CPC Class Codes: H01L 2223/54473 for use after dicing
• CPC Class Codes: H01L 23/544 Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps test patterns for characterising or monitoring manufacturing processes H01L22/00
• CPC Class Codes: H01L 24/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/12042 LASER
• CPC Class Codes: H01L 2924/14 Integrated circuits

Abstract

The present invention comprises methods and apparatus relating to the marking and identification of defective die sites on a mounting substrate. In this regard, a mounting substrate is provided which is inspected and tested for visual and electrical defects. The inspection and testing data are then compiled and correlated with individual die sites. Information relating to the functionality and/or various defects of one or more die sites is then encoded in the form of a designator placed on the substrate. Other information, such as the manufacturing process history of the mounting substrate may also be encoded on the designator. The information encoded on the designator may then be read or scanned by, for example, by computer driven video equipment, and used in a die attach process to discriminately place semiconductor dice only on known good die sites, as indicated by the inspection and testing data. The designator preferably comprises information encoded in the form of a bar code, or a series of identifying marks. The designator also preferably comprises a strip of magnetic tape with information programmed thereon. The encoded information may also be correlated with a computerized map of a mounting substrate. Correlated data regarding die site functionality can then be electronically transferred to a die bonding apparatus.

Claims

1. A method for identifying at least one defective die site on a substrate, comprising:

providing a substrate with an array of semiconductor die sites configured on a surface thereof;

evaluating said array of semiconductor die sites for defects; and

encoding information relating to at least one semiconductor die site of said array of semiconductor die sites on an off-site surface portion of said substrate.

2. The method of claim 1, wherein said encoding information relating to at least one semiconductor die site comprises encoding said information in a form of a bar code.

3. The method of claim 2, wherein said encoding information in the form of a bar code comprises inscribing said off-site surface portion of said substrate by directing optical energy thereon.

4. The method of claim 2, wherein said encoding said information in the form of a bar code comprises encoding said bar code on a label.

5. The method of claim 1, wherein said encoding information relating to at least one semiconductor die site comprises encoding said information on a strip of magnetic tape.

6. The method of claim 1, wherein said encoding information relating to at least one semiconductor die site comprises encoding said information as a plurality of identifying marks located on said off-site surface portion of said substrate.

7. The method of claim 6, wherein said plurality of identifying marks comprises at least one mark selected from the group consisting of alphanumeric characters, symbols, colors, binary sequences, and combinations of any thereof.

8. The method of claim 7, wherein said identifying marks are inscribed in said off-site surface portion of said substrate with optical energy.

9. The method of claim 1, wherein said encoding information relating to at least one semiconductor die site comprises encoding information relating to performance characteristics of said at least one semiconductor die site.

10. The method of claim 9, further comprising correlating information relating to said evaluating said array of semiconductor die sites for defects with said at least one semiconductor die site of said array of semiconductor die sites.

11. The method of claim 10, wherein said encoding information and said correlating information comprise automated processes.

12. The method of claim 1, further comprising reading said encoded information on said off-site surface portion of said substrate in furtherance of a die-attach process.

13. The method of claim 1, wherein said evaluating said array of semiconductor die sites for defects comprises inspecting and testing said array of semiconductor die sites for structural and electrical integrity.

14. A die-attach process, comprising:

providing a mounting substrate having at least one semiconductor die site configured thereon;

evaluating said at least one semiconductor die site for defects;

encoding information relating to one or more defects of said at least one semiconductor die site on an off-site surface portion of said mounting substrate;

reading said encoded information in furtherance of a die attach process; and

attaching a semiconductor die to known good die sites of said at least one semiconductor die site.

15. The method of claim 14, wherein said encoding information relating to one or more defects of at least one semiconductor die site comprises encoding said information in a form of a bar code.

16. The method of claim 15, wherein said encoding information in the form of a bar code comprises inscribing said off-site surface portion of said mounting substrate by directing optical energy thereon.

17. The method of claim 15, wherein said encoding said information in the form of a bar code comprises encoding said bar code on a label.

18. The method of claim 14, wherein said encoding information relating to one or more defects of at least one semiconductor die site comprises encoding said information on a strip of magnetic tape.

19. The method of claim 14, wherein said encoding information relating to one or more defects of at least one semiconductor die site comprises encoding said information as a plurality of identifying marks located on said off-site surface portion of said mounting substrate.

20. The method of claim 19, wherein said plurality of identifying marks comprises at least one mark selected from the group consisting of alphanumeric characters, symbols, colors, binary sequences, and combinations of any thereof.

21. The method of claim 20, wherein said identifying marks are inscribed in said off-site surface portion of said mounting substrate by directing optical energy thereon.

22. The method of claim 14, wherein said encoding information relating to one or more defects of at least one semiconductor die site comprises encoding information relating to performance characteristics of said at least one semiconductor die site.

23. The method of claim 22, further comprising correlating information relating to said evaluating at least one semiconductor die site for defects with at least one of said at least one semiconductor die site.

24. The method of claim 23, wherein said encoding information and said correlating information comprise automated processes.

25. The method of claim 14, wherein said evaluating said at least one semiconductor die site for defects comprises inspecting and testing said at least one semiconductor die site for structural and electrical integrity.

26. The method of claim 14, further comprising encoding instructions on said off-site surface portion of said mounting substrate for orienting pin one of a semiconductor die relative to each of said at least one semiconductor die site.

27. The method of claim 14, further comprising encoding information on said off-site surface portion of said mounting substrate uniquely identifying said mounting substrate, and further comprising encoding information on said off-site surface portion of said mounting substrate chronicling a manufacturing process history for said mounting substrate.

28. A method of assembling a semiconductor device package comprising:

providing a semiconductor substrate having a first surface and a second surface, at least one of said first surface and said second surface comprising a plurality of semiconductor die sites;

evaluating said plurality of semiconductor die sites for defects;

correlating information obtained from said evaluating said plurality of semiconductor die sites with at least some of said plurality of semiconductor die sites on one of said first surface and said second surface of said semiconductor substrate;

encoding information relating to at least one of said plurality of semiconductor die sites on an off-site surface portion of said semiconductor substrate;

reading said encoded information from said off-site surface portion of said semiconductor substrate; and

attaching a semiconductor die to known good semiconductor die sites of said plurality of semiconductor die sites.

29. The method of claim 28, wherein said encoding information relating to at least one of said plurality of semiconductor die sites comprises encoding said information in a form of a bar code.

30. The method of claim 29, wherein said encoding information in the form of a bar code comprises inscribing said off-site surface portion of said semiconductor substrate by directing optical energy thereon.

31. The method of claim 29, wherein said encoding said information in the form of a bar code comprises encoding said bar code on a label.

32. The method of claim 28, wherein said encoding information relating to at least one of said plurality of semiconductor die sites comprises encoding said information on a strip of magnetic tape.

33. The method of claim 28, wherein said encoding information relating to at least one of said plurality of semiconductor die sites comprises encoding said information as a plurality of identifying marks located on said off-site surface portion of said semiconductor substrate.

34. The method of claim 33, wherein said plurality of identifying marks comprises at least one mark selected from the group consisting of alphanumeric characters, symbols, colors, binary sequences, and combinations of any thereof.

35. The method of claim 34, wherein said identifying marks are inscribed in said off-site surface portion of said semiconductor substrate by directing optical energy thereon.

36. The method of claim 28, wherein said encoding information relating to at least one of said plurality of semiconductor die sites comprises encoding information relating to performance characteristics of said at least one of said plurality of semiconductor die sites.

37. The method of claim 28, further comprising encoding information on said off-site surface portion of said semiconductor substrate uniquely identifying said semiconductor substrate, and further comprising encoding information on said off-site surface portion of said semiconductor substrate chronicling a manufacturing process history for said semiconductor substrate.

38. The method of claim 28, wherein said encoding information and said correlating information comprise automated processes.

39. The method of claim 28, wherein said evaluating said plurality of semiconductor die sites for defects comprises inspecting and testing said plurality of semiconductor die sites for structural and electrical integrity.

40. The method of claim 28, further comprising encoding instructions on said off-site surface portion of said semiconductor substrate for orienting a semiconductor die relative to each of said plurality of semiconductor die sites.

41. A method for identifying at least one defective semiconductor die site on a substrate comprising:

providing a substrate with an array of semiconductor die sites configured on a surface thereof;

evaluating said array of semiconductor die sites for defects; and

encoding information relating to at least one semiconductor die site of said array of semiconductor die sites off-site of said substrate.

42. The method of claim 41, wherein said encoding information relating to at least one semiconductor die site of said array of semiconductor die sites off-site of said substrate comprises encoding information in a computerized map of said substrate.

43. The method of claim 42, further comprising reading said computerized map of said substrate in furtherance of a die attach process.

44. The method of claim 43, wherein said encoded information relating to at least one semiconductor die site of said array of semiconductor die sites includes information obtained from said evaluating said array of semiconductor die sites for defects.

45. The method of claim 41, further comprising encoding information on an off-site surface portion of said substrate, said information on said off-site portion of said substrate comprising a unique identifier for said substrate.

46. A designator located on a semiconductor device mounting substrate comprising:

encoded information placed on an off-site surface portion of a semiconductor device mounting substrate, said semiconductor device mounting substrate having at least one semiconductor die site configured on a surface thereof, said encoded information including information related to performance characteristics of at least one of said at least one semiconductor die site.

47. The designator of claim 46, wherein said encoded information comprises information in a form of a bar code.

48. The designator of claim 47, wherein said bar code comprises an inscription on said off-site surface portion of said semiconductor device mounting substrate formed by directed optical energy.

49. The designator of claim 46, wherein said encoded information comprises information encoded on a strip of magnetic tape.

50. The designator of claim 46, wherein said encoded information further comprises information uniquely identifying said semiconductor device mounting substrate.

51. The designator of claim 50, wherein said encoded information further comprises information which chronicles a manufacturing process history for said semiconductor device mounting substrate.

52. The designator of claim 46, wherein said encoded information further comprises instructions for orientation of a pin one of a semiconductor die relative to each said at least one semiconductor die site.

53. The designator of claim 52, wherein said encoded information comprises at least one mark selected from the group consisting of alphanumeric characters, symbols, colors, binary sequences, and combinations of any thereof.

54. The designator of claim 46, wherein said encoded information further comprises information relating to testing and inspection of said semiconductor device mounting substrate.

55. A substrate for mounting at least one semiconductor die thereon, comprising:

a substrate having a first surface and a second surface, at least one of said first surface and said second surface comprising at least one semiconductor die site; and

a designator located on an off-site surface portion of said substrate, said designator comprising encoded information relating to performance characteristics of at least one of said at least one semiconductor die site.

56. The substrate of claim 55, wherein said encoded information comprises information in a form of a bar code.

57. The substrate of claim 56, wherein said bar code comprises an inscription on said off-site surface portion of said substrate formed by directed optical energy.

58. The substrate of claim 55, wherein said encoded information comprises information encoded on a strip of magnetic tape.

59. The substrate of claim 55, wherein said encoded information further comprises information uniquely identifying said substrate.

60. The substrate of claim 59, wherein said encoded information further comprises information which chronicles a manufacturing process history for said substrate.

61. The substrate of claim 55, wherein said encoded information further comprises instructions for orientation of a pin one of a semiconductor die relative to each said at least one semiconductor die site.

62. The substrate of claim 61, wherein said encoded information comprises at least one identifying mark selected from the group consisting of alphanumeric characters, symbols, colors, binary sequences, and combinations of any thereof.

63. The substrate of claim 55, wherein said encoded information further comprises information relating to testing and inspection of said substrate.