Vacuum pipe
First Claim
1. A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprising:
- an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening;
an annular sealing surface at the part projecting through the opening into the vacuum from outside the vacuum;
a sealing arrangement which is provided between the annular sealing surfaces of the wall and of the part and which comprises at least one sealing ring of elastic material; and
a guide device which guides the part relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part moves relative to the wall.
1 Assignment
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Accused Products
Abstract
A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprises an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening, an annular sealing surface at the part projecting through the opening into the vacuum from outside the vacuum, a sealing arrangement which is provided between the annular sealing surfaces of the wall and of the part and which comprises at least one sealing ring of elastic material, and a guide device which guides the part relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part moves relative to the wall.
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Citations
11 Claims
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1. A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprising:
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an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening;
an annular sealing surface at the part projecting through the opening into the vacuum from outside the vacuum;
a sealing arrangement which is provided between the annular sealing surfaces of the wall and of the part and which comprises at least one sealing ring of elastic material; and
a guide device which guides the part relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part moves relative to the wall. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A vacuum valve comprising:
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a valve opening which is provided in a valve housing and is surrounded by a valve seat;
a valve plate which is arranged on at least one valve rod and can close the valve opening in the closed state of the valve;
an actuating device by which the valve plate can be displaced from its open position releasing the valve opening initially into a position which is located opposite the valve opening, but which is lifted from the valve seat; and
can be subsequently moved against the valve seat by the valve rod swiveling about an axis and can be pressed against this valve seat;
a vacuum pipe for a part surrounding the valve rod, by which the part surrounding the valve rod is guided out of the vacuum and which enables the part surrounding the valve rod to swivel together with the valve rod, wherein the vacuum pipe comprises;
an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening;
an annular sealing surface at the part which surrounds the valve rod and which projects through the opening into the vacuum from outside the vacuum and which faces the sealing surface surrounding the opening;
a sealing arrangement which is provided between the annular sealing surfaces of the wall and the part surrounding the valve rod and which comprises at least one sealing ring of elastic material; and
a guide device which guides the part surrounding the valve rod relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part surrounding the valve rod, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part surrounding the valve rod moves relative to the wall. - View Dependent Claims (8, 9, 10, 11)
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Specification