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Method of manufacture of a thermoelastic bend actuator using PTFE and corrugated copper ink jet printer

  • US 6,416,679 B1
  • Filed: 07/10/1998
  • Issued: 07/09/2002
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing an ink jet printhead, the method comprising the steps of:

  • depositing a sacrificial material on a substrate and etching the sacrificial material to form a plurality of ink chambers on the substrate, with each ink chamber having an ink ejection port; and

    depositing a thermal expansion material and a conductive material, capable of being resistively heated, on the substrate so that the conductive material is positioned in the thermal expansion material;

    etching the conductive material and the thermal expansion material to form a thermal actuator having a free end in each chamber, so that each thermal actuator comprises an electrical heater element of the conductive material, positioned in the thermal expansion material, the thermal expansion material having a coefficient of thermal expansion which is such that the thermal expansion material is capable of expansion upon heating by the electrical heater element, the step of depositing the thermal expansion material and the conductive material being carried out so that the heater element is positioned in the thermal expansion material such that expansion of the thermal expansion material results in displacement of the free end of the thermal actuator with respect to the ink ejection port.

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