Method for fabrication of high inductance inductors and related structure
First Claim
1. A method comprising steps of:
- patterning a conductor in a dielectric, said dielectric having a first permeability;
etching a trench in said dielectric, said trench being adjacent to said conductor;
filling said trench with a high permeability material, said high permeability material having a second permeability greater than said first permeability.
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Accused Products
Abstract
According to various embodiments, a conductor is patterned in a dielectric. The conductor can be patterned, for example, in the shape of a square spiral. The conductor can comprise, for example, copper, aluminum, or copper-aluminum alloy. The dielectric can be, for example, silicon oxide or a low-k dielectric. Trenches are etched next to the patterned conductor in the dielectric. The trenches are filled with a material having a permeability substantially higher than the permeability of the dielectric. The high permeability material can be, for example, nickel, iron, nickel-iron alloy, or magnetic oxide. As a result, an inductor having a high inductance value is achieved without lowering the quality factor of the inductor.
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Citations
20 Claims
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1. A method comprising steps of:
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patterning a conductor in a dielectric, said dielectric having a first permeability;
etching a trench in said dielectric, said trench being adjacent to said conductor;
filling said trench with a high permeability material, said high permeability material having a second permeability greater than said first permeability. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A structure comprising:
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a conductor patterned in a dielectric, said dielectric having a first permeability;
a trench in said dielectric, said trench being adjacent to said conductor;
said trench being filled with a high permeability material, said high permeability material having a second permeability greater than said first permeability. - View Dependent Claims (8, 9, 10, 11, 12)
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13. An inductor in a semiconductor die, said inductor comprising:
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a plurality of metal turns in a dielectric, said dielectric having a first permeability;
a plurality of trenches, each of said plurality of trenches being filled with a permeability conversion material;
said permeability conversion material having a second permeability greater than said first permeability, said permeability conversion material causing an increase in an inductance of said inductor. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification