Wide tuning range variable MEMs capacitor
First Claim
1. A variable micro electromechanical capacitor, comprising:
- a bias plate;
a capacitance plate; and
a movable plate held by a supporting suspension, the movable plate being disposed opposite both said bias plate and said capacitance plate and being movable relative to said capacitance plate;
wherein a distance between opposing surfaces of said capacitance plate and said movable plate is less than a distance between said bias plate and said capacitance plate.
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Accused Products
Abstract
A MEM capacitor having a capacitance plate nearer a movable plate than a separate bias plate. Voltage potential between the bias plate and movable plate determines the value of capacitance between the movable plate and the capacitance plate. In a preferred MEM capacitor, the movable plate is suspended over two fixed plates, a bias plate and a capacitance plate. The movable plate is disposed opposite both the bias plate and the capacitance plate. A distance between opposing surfaces of the capacitance plate and the movable plate is less than a distance between the bias plate and the capacitance plate. Preferably, the relative difference in distances between the plates is accomplished by a mechanically suspended movable plate that is shaped to have portions in at least two separate planes.
47 Citations
14 Claims
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1. A variable micro electromechanical capacitor, comprising:
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a bias plate;
a capacitance plate; and
a movable plate held by a supporting suspension, the movable plate being disposed opposite both said bias plate and said capacitance plate and being movable relative to said capacitance plate;
whereina distance between opposing surfaces of said capacitance plate and said movable plate is less than a distance between said bias plate and said capacitance plate. - View Dependent Claims (2, 3, 4, 5, 6, 8, 9, 10, 11)
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7. The capacitor according 6, comprising four cantilever beams connected to four contact pads and said movable plate.
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12. The capacitor according 11, wherein said set of cantilever beams comprises four cantilever beams connected to four contact pads and four separate sides of said movable plate.
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13. A micro electromechanical capacitor, comprising:
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a substrate;
a thin film capacitance plate and associated electrical contact both formed on a surface of said substrate;
a thin film bias plate and associated electrical contact both formed on said surface of said substrate;
a set of contact pads on said substrate; and
a thin film movable plate suspended over said thin film capacitance plate and said thin film bias plate from a set of cantilever arms terminating at said contact pads to form an air gap between said thin film capacitance plate and said thin film bias plate, wherein said thin film movable plate is shaped to be closer to said capacitance plate than said bias plate. - View Dependent Claims (14)
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Specification