Toroidal plasma source for plasma processing

• US 6,418,874 B1
• Filed: 05/25/2000
• Issued: 07/16/2002
• Est. Priority Date: 05/25/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Loewenhardt, Peter, Lane, Christopher T., Lai, Canfeng, Cox, Michael S., Parks, John P., Shamouilian, Shamouil, Wanamaker, David P., Majewski, Robert B.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): HASSANZADEH, PARVIZ
• Application Number:
  US09/584,167
• Time in Patent Office: 782 Days
• Field of Search: 118/723.I, 118/723.IR, 118/723.AN, 118/723.ER, 156/345, 315/111.51, 315/111.71, 315/111.21, 315/111.41, 204/298.16, 204/298.37
• US Class Current: 118/723.00I
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma

Abstract

A toroidal plasma source (28) within a substrate processing chamber (10). The toroidal plasma source forms a poloidal plasma with theta symmetry. The poloidal plasma current is essentially parallel to a surface of the plasma generating structure, thus reducing sputtering erosion of the inner walls. The plasma current is similarly essentially parallel to a process surface (32) of a substrate (34) within the chamber. In a further embodiment, a shaped member (66) between the substrate and the plasma source controls the plasma density in a selected fashion to enhance plasma processing uniformity.

Claims

1. A substrate processing chamber comprising:

a chamber body;

a chamber top disposed on the chamber body;

a toroidal plasma source contained within the substrate processing chamber, said toroidal plasma source including a core;

a substrate support member disposed to hold an essentially flat substrate with a process surface, wherein the process surface is opposite and essentially parallel to the core; and

a shaped member disposed between the toroidal plasma source and the process surface of the substrate, said shaped member having a bottom surface that is contoured to affect plasma density distribution.

2. The substrate processing chamber of claim 1 further comprising:

a support member wherein power for the toroidal plasma source is carried to the toroidal plasma source on a lead through the support member supporting the toroidal plasma source in the chamber.

3. The substrate processing chamber of claim 1 wherein the toroidal plasma source includes a core having a plurality of ferrite segments and a non-magnetic space having a selected thickness, the non-magnetic spacer being disposed between two of the plurality of ferrite segments.

4. The substrate processing chamber of claim 1 further comprising an RF generator mounted directly on the chamber and operatively coupled to said core without tunable matching circuitry.

5. The substrate processing chamber of claim 1 wherein the shaped member has an outer perimeter portion extending beyond a substrate edge.

6. The substrate processing chamber of claim 1 wherein when RF energy is applied to said plasma source and plasma current is formed along an electric field line essentially parallel to said substrate.

7. The substrate processing chamber of claim 1 wherein the section of the shaped member has first thickness and a second thickness, the first thickness being less than the second thickness, wherein the first thickness is proximate to a center plasma conduit of the shaped member.

8. The substrate processing chamber of claim 1 wherein at least part of at least outer surface of the shaped member does not lie in a plain parallel to the plain of substrate.

9. A substrate processing chamber comprising:

a chamber body;

a chamber top disposed on the chamber body;

a toroidal plasma source contained within the substrate processing chamber, said toroidal plasma source including a core;

a substrate support member disposed to hold a substrate with a process surface, wherein the process surface is opposite and essentially parallel to the core; and

a shaped member disposed between the toroidal plasma source and the process surface of the substrate, said shaped member having a bottom surface that is contoured to affect plasma density distribution, wherein the shaped member has an outer perimeter portion extending beyond a substrate edge; and

wherein the shaped member further comprises at least a gas port.

10. The substrate processing chamber of claim 9 wherein the gas port is disposed on the outer perimeter portion.

11. The substrate processing chamber of claim 9 wherein the gas port is disposed along a center plasma conduit (170).

12. A substrate processing chamber comprising:

a toroidal plasma source contained within the substrate processing chamber, the toroidal plasma source including a core having a plurality of ferrite segments;

a substrate support member disposed to hold a substrate with a process surface opposite and essentially parallel to a major plane of the toroidal plasma source; and

a bottom plate disposed between the toroidal plasma source and the process surface, the bottom plate having at least a gas port.

13. The substrate processing chamber of claim 12 wherein the bottom plate has an outer perimeter portion extending beyond a substrate edge and the gas port is disposed on the outer perimeter portion.

14. The substrate processing chamber of claim 12 wherein the gas ports disposed on the outer perimeter portion of the bottom plate are within a substrate edge.

15. A substrate processing chamber comprising:

a chamber top having a plurality of tubes, each of the plurality of tubes being disposed to complete a plasma path loop inside the substrate processing chamber around a toroidal transformer core that is outside of the substrate processing chamber,

a first plasma path loop configured to provide a portion of a first poloidal plasma current essentially parallel to a processing surface of a substrate and

a second plasma path loop configured to provide a portion of a second poloidal plasma current essentially parallel to the processing surface.

16. The substrate processing chamber of claim 15 wherein at least one of the plurality of tubes is made from a material selected from the group consisting of aluminum, anodized aluminum, and stainless steel.

17. A substrate processing chamber comprising:

a chamber body;

a chamber top disposed on the chamber body;

a toroidal plasma source contained within the substrate processing chamber, the toroidal plasma source having a plurality of ferrite segments; and

a non-magnetic spacer having a selected thickness, the non-magnetic spacer being disposed between two of the plurality of ferrite segments.

18. A substrate processing chamber comprising:

a housing that defines a vacuum chamber;

a toroidal plasma source contained within the housing, said toroidal plasma source including a core;

a substrate support member disposed to hold a substrate within said vacuum chamber such that a process surface of said substrate is opposite and essentially parallel to the core; and

a shaped member disposed between the toroidal plasma source and the process surface of the substrate, wherein the shaped member comprises at least a gas port and has a bottom surface that is contoured to affect plasma density distribution.

19. The substrate processing chamber of claim 18 wherein the shaped member comprises a plurality of outer and inner gas ports and has an outer perimeter portion extending beyond a substrate edge;

and

wherein a plurality of outer gas ports configured to release gas into said chamber from outside of substrate edge, and a plurality of inner gas ports configured to release gas into said chamber from a position within said substrate edge.