System and method for dividing flow

• US 6,418,954 B1
• Filed: 04/17/2001
• Issued: 07/16/2002
• Est. Priority Date: 04/17/2001
• Status: Expired due to Term

• Current Assignee: MSK Instruments, Inc.
• Original Assignee: MKS Instruments Incorporated
• Inventors: Clark, William R., Taylor, Matthew Thomas, Hallahan, John Christopher
• Primary Examiner(s): HEPPERLE, STEPHEN M
• Application Number:
  US09/836,748
• Time in Patent Office: 455 Days
• Field of Search: 137/98, 137/100, 137/101.19, 137/101.21, 137/9, 137/118.04
• US Class Current: 137/9
• CPC Class Codes: G05D 11/132 by controlling the flow of the individual components G05D11/133 takes precedence
• CPC Class Codes: Y10T 137/0363 For producing proportionate flow
• CPC Class Codes: Y10T 137/2529 With electrical controller
• CPC Class Codes: Y10T 137/2531 Flow displacement element actuates electrical controller
• CPC Class Codes: Y10T 137/2657 Flow rate responsive

Abstract

A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flow through the first line and provides a signal indicative of the measured flow rate. A restrictor restricts gas flow through the first line to a desired flow rate, and has a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit. A mass flow controller receives the signal indicative of the measured flow rate from the mass flow meter and maintains a flow rate through the second line based on the signal.

Claims

1. A system for dividing a single flow of gas into two or more secondary flows of known, precise values without requiring a high upstream pressure, comprising:

an inlet for receiving the single flow of gas;

a first flow line connected to the inlet;

a second flow line connected to the inlet;

a mass flow meter measuring gas flow through the first line and providing a signal indicative of the measured flow rate;

a restrictor restricting gas flow through the first line to a desired flow rate, the restrictor having a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit; and

a mass flow controller controlling gas flow through the second line, the mass flow controller receiving the signal indicative of the measured flow rate from the mass flow meter and maintaining a flow rate through the second line based on the signal.

2. A system according to claim 1, wherein the mass flow meter and the mass flow controller are provided with the same flow range.

3. A system according to claim 1, wherein the predetermined upper pressure limit is equal to about 15 PSIA.

4. A system according to claim 1, wherein the mass flow controller maintains a flow rate through the second line substantially equal to the measured flow rate of the first line.

5. A system according to claim 1, further comprising a controller for proportionally adjusting the signal indicative of the measured flow rate from the mass flow meter prior to the signal being received by the mass flow controller such that the mass flow controller maintains a flow rate through the second line substantially equal to a predetermined ratio of the measured flow rate of the first line.

6. A system according to claim 1, further comprising:

at least a third flow line connected to the inlet; and

a mass flow controller controlling gas flow through the third line, the mass flow controller receiving the signal indicative of the measured flow rate from the mass flow meter and maintaining a flow rate through the third line based on the signal.

7. A system according to claim 6, wherein the mass flow controllers maintain flow rates through the second and the third lines substantially equal to the measured flow rate of the first line.

8. A system according to claim 6, further comprising at least one controller for proportionally adjusting the signal indicative of the measured flow rate from the mass flow meter prior to the signal being received by the mass flow controllers such that the mass flow controllers maintain flow rates through the second and the third lines substantially equal to a predetermined ratio of the measured flow rate of the first line.

9. A system according to claim 8, wherein the signal indicative of the measured flow rate from the mass flow meter is adjusted such that the mass flow controllers maintain substantially equal flow rates through the second and the third lines.

10. A method for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure, comprising:

receiving the single flow in to an inlet;

connecting a first flow line to the inlet;

connecting a second flow line to the inlet;

restricting gas flow through the first line to a desired flow rate so that an upstream pressure is lower than a predetermined upper pressure limit;

measuring gas flow through the first line; and

maintaining a flow rate through the second line based on the measured gas flow through the first line.

11. A method according to claim 10, wherein the predetermined upper pressure limit is equal to about 15 PSIA.

12. A method according to claim 10, wherein the flow rate through the second line is maintained substantially equal to the measured flow rate of the first line.

13. A method according to claim 11, wherein the flow rate through the second line is maintained at a predetermined ratio of the measured flow rate of the first line.

14. A method for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure, comprising:

receiving the single flow in to an inlet;

connecting a first flow line to the inlet;

connecting a second flow line to the inlet;

connecting at least a third flow line to the inlet;

restricting gas flow through the first flow line to a desired flow rate so that an upstream pressure is lower than a predetermined upper pressure limit;

measuring gas flow through the first line; and

maintaining a flow rate through the second and the third flow lines based on the measured gas flow through the first line.

15. A method according to claim 14, wherein the predetermined upper pressure limit is equal to about 15 PSIA.

16. A method according to claim 14, wherein the flow rates through the second and the third flow lines are maintained substantially equal to the measured flow rate of the first line.

17. A method according to claim 16, wherein the flow rates through the second and the third flow lines are maintained at predetermined ratios of the measured flow rate of the first line.

18. A method according to claim 17, wherein substantially equal flow rates are maintained through the second and the third lines.

19. A method according to claim 17, wherein the predetermined ratios are selected through a single controller.