Film-forming apparatus and film-forming method
First Claim
1. A film-forming apparatus comprisinga film-forming substrate conveying device in a vacuum apparatus with an adjustable reduced pressure atmosphere, a pair of magnetron sputtering cathodes located proximally to each other and situated in a straight line in the direction perpendicular to the conveying direction of the substrate, with at least one row situated in the conveying direction of the substrate, a pair of targets situated on said cathodes, a film-forming substrate positioned opposite said targets, and a power source device that alternately reverses the polarity of said pair of cathodes so that when the first of said pair of cathodes is used as a negative electrode the second of said pair of cathodes is used as a positive electrode, and when the second of said pair of cathodes is used as a negative electrode the first of said pair of cathodes is used as a positive electrode, in order to apply a glow discharge-producing voltage to the pair of targets corresponding to each of said pair of cathodes, situated on the surface of each cathode.
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Accused Products
Abstract
There may be used a film-forming apparatus having a substrate 4 that is rotatable around the center of one rotating axis 10 in the vertical direction situated in an inner cylinder 12, and a plurality (four in FIG. 2) of target units each comprising the pair of targets 2A, 2B (2B is under 2A serially arranged in the vertical direction inside an outer cylinder 13 opposite the surface 4a of the substrate 4, which are arranged in parallel in the circumferential direction of the inner wall of the outer cylinder 13. By employing a method whereby voltage is applied while alternatively reversing the polarity to each of the targets 2A, 2B, it is possible to form a coating on the surface of a substrate by glow discharge sputtering, to accomplish destaticizing while the sputtering can be carried out using a small in-line or bell jar apparatus with small space.
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Citations
7 Claims
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1. A film-forming apparatus comprising
a film-forming substrate conveying device in a vacuum apparatus with an adjustable reduced pressure atmosphere, a pair of magnetron sputtering cathodes located proximally to each other and situated in a straight line in the direction perpendicular to the conveying direction of the substrate, with at least one row situated in the conveying direction of the substrate, a pair of targets situated on said cathodes, a film-forming substrate positioned opposite said targets, and a power source device that alternately reverses the polarity of said pair of cathodes so that when the first of said pair of cathodes is used as a negative electrode the second of said pair of cathodes is used as a positive electrode, and when the second of said pair of cathodes is used as a negative electrode the first of said pair of cathodes is used as a positive electrode, in order to apply a glow discharge-producing voltage to the pair of targets corresponding to each of said pair of cathodes, situated on the surface of each cathode.
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5. A film-forming method on a substrate being conveyed by sputtering targets on cathodes comprising
situating a pair of cathodes located proximally to each other in a straight line in the direction perpendicular to the conveying direction of the substrate, with at least one row situated in the conveying direction of the substrate, situating a target on said cathode and a film-forming substrate positioned opposite said target, in a vacuum area that allows adjustment of a reduced pressure atmosphere to form a film on the surface of said substrate, and alternately reversing the polarity of said pair of cathodes so that when the first of said pair of cathodes is used as a negative electrode the second of said pair of cathodes is used as a positive electrode, and when the second of said pair of cathodes is used as a negative electrode the first of said pair of cathodes is used as a positive electrode, in order to apply a glow discharge-producing voltage to a pair of targets corresponding to each of said pair of cathodes, situated on the surface of each cathode, and simultaneously sputtering said pair of targets by the produced glow discharge to form a film comprising the structural material of said targets on the surface of said substrate.
Specification