Methods for creating elements of predetermined shape and apparatuses using these elements
First Claim
1. A method for creating elements having a predetermined shape, said method comprising:
- fabricating in a first substrate a plurality of functional components in a plurality of elements, said functional components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first substrate;
etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
releasing said plurality of elements from said first substrate.
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Accused Products
Abstract
Methods for forming elements having a predetermined shape and for assembling the elements. In one example of a method, each of the elements includes a functional component which is disposed on a first face of a first substrate. A layer representing a first portion of the first substrate at a second face of the first substrate is removed, leaving a second portion of the first substrate on the first substrate. The second portion is etched through a first patterned mask on a surface of the second portion. The plurality of elements is then released from the first substrate. The plurality of elements may then be combined with a fluid to form a slurry. In another example of a method, the first face is etched vertically in regions adjacent to the edges of the plurality of elements, and regions below the first face are etched laterally, and then the plurality of elements are released from the substrate. Other methods of creating elements having a predetermined shape are described, and methods of using and/or assembling these elements are also described.
287 Citations
28 Claims
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1. A method for creating elements having a predetermined shape, said method comprising:
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fabricating in a first substrate a plurality of functional components in a plurality of elements, said functional components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
removing a layer representing a first portion of said first substrate at said second face leaving a second portion of said first substrate on said first substrate;
etching said second portion of said first substrate through a first patterned mask on a surface of said second portion;
releasing said plurality of elements from said first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
bonding said first face of said first substrate to a second substrate.
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3. A method as in claim 1 wherein said etching said second portion exposes at least a portion of each of said plurality of elements and wherein each of said plurality elements comprises at least one functional component which comprises an electrical component.
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4. A method as in claim 1 wherein said removing said layer comprises a mechanical process of one of grinding, lapping or polishing said first portion.
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5. A method as in claim 1 wherein each of said plurality of elements is localized separately on said first face relative to other of said plurality of elements.
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6. A method as in claim 1 wherein said first patterned mask is resistant to a KOH etch which etches said second portion.
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7. A method as in claim 1 wherein each of said elements has a substantially quadrilateral cross section which is said predetermined shape which is designed to fit into an opening on a receiving substrate.
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8. A method as in claim 1 further comprising:
cleaning said plurality of elements after said releasing of said plurality of elements.
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9. A method as in claim 1 wherein each of said functional components comprises an electrical component for at least one of (a) a liquid crystal display pixel;
- (b) a light emitting diode display pixel;
(c) a solar cell element; and
(d) an electromagnetic signal detector.
- (b) a light emitting diode display pixel;
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10. A method as in claim 1 wherein said functional components are fabricated into said first face and a passivation layer is applied over said functional components and wherein a layer comprising tungsten is applied over said passivation layer and wherein said releasing comprises etching said layer comprises tungsten.
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11. A method as in claim 1 wherein said first patterned mask is formed by aligning on said second face a plurality of shapes formed by said first patterned mask relative to functional components disposed on said first face.
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12. A method as in claim 1 wherein said etching said second portion comprises first etching with an isotropic etchant and second etching with an anisotropic etchant.
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13. A method as in claim 12 wherein said isotropic etchant comprises KOH and an oxidizer and said anisotropic etchant comprises KOH, and said second etching is after said first etching.
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14. A method for creating elements having a predetermined shape, said method comprising:
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fabricating in a first substrate a plurality of functional components in a plurality of elements, said functional components being disposed on a first face of said first substrate, said first substrate having two surfaces comprising said first face and a second face;
applying, after said fabricating, a release layer on said first face;
etching said second face to expose at least a portion of each of said plurality of elements;
etching said release layer.
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15. A method for creating elements having a predetermined shape, said method comprising:
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fabricating in a first substrate a plurality of functional components in a plurality of elements, said plurality of functional components being disposed on a first face of said substrate which also has a second face;
etching vertically, in a first etching process, regions of said first face which are adjacent to edges of said plurality of elements;
etching laterally, in a second etching process, regions below said first face which are adjacent to said edges;
releasing said plurality of elements from said first substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
etching a surface region on said first face between said trench and at least one of said corners.
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26. A method for creating elements having a predetermined shape, said method comprising:
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depositing a first layer into a second layer;
fabricating a plurality of functional components in a plurality of elements in said first layer;
etching at least said first layer to determine said predetermined shape for each of said plurality of elements;
etching said second layer such that a density of said second layer, after said etching of said second layer, is reduced;
releasing said plurality of elements from said second layer after said etching of said second layer. - View Dependent Claims (27, 28)
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Specification