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Optical detectors using nulling for high linearity and large dynamic range

  • US 6,420,706 B1
  • Filed: 01/07/2000
  • Issued: 07/16/2002
  • Est. Priority Date: 01/08/1999
  • Status: Expired due to Fees
First Claim
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1. An infrared imager formed on a semiconductor substrate, comprising:

  • a plurality of infrared sensors, each infrared sensor forming a picture element (pixel) of the infrared image, each of said infrared sensors separately comprising;

    a deflectable bi-material micro-cantilever, said micro-cantilever being deflectable in response to each of incident infrared radiation and a further stimulus, and having a reference position relative to the substrate when not exposed to said infrared radiation and said further stimulus;

    a control element integral to the semiconductor substrate responsive to a control signal for providing said further stimulus to said deflectable bi-material micro-cantilever; and

    an electronic circuit coupled to each of said micro-cantilever and said control element, capable of reading a position of said micro-cantilever including said reference position, and capable of determining and providing said control signal to said control element sufficient to maintain said micro-cantilever substantially at said reference position when said micro-cantilever is exposed to infrared radiation.

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