Coupled multilayer soft magnetic films for high frequency microtransformer for system-on-chip power supply
First Claim
1. An electromagnetic element comprising:
- a substrate with at least a first and second through-holes that define between them a coil winding area that includes a top surface of said substrate, a bottom surface of said substrate, and side surfaces of said through-holes;
a first layer of magnetic material provided on said substrate in said coil winding area;
a first layer of electrically conductive material forming at least one coil winding provided on said substrate in said coil winding area; and
a second layer of magnetic material formed over said first layer of electrically conductive material, said second layer of magnetic material being connected with said first layer of magnetic material.
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Accused Products
Abstract
A microtransformer for a high-performance system-on-chip power supply is disclosed. Through-wafer openings in a substrate allow the primary and secondary wiring on both surfaces of the silicon substrate. An insulating silicon oxide layer is first deposited on all surfaces of the substrate. A magnetic film is further deposited on the silicon oxide layer followed by the application of another insulating layer. Coils are fabricated next by patterned deposition on both sides of the substrate and through the holes. The coils can be, e.g., single coils or primary or secondary coils of a transformer structure, with secondary having one or more output taps to supply different output voltages. For better flux closure, various magnetic layers and insulators can be deposited on top of the windings. For even a better flux closure, the various magnetic layers can be coupled.
38 Citations
103 Claims
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1. An electromagnetic element comprising:
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a substrate with at least a first and second through-holes that define between them a coil winding area that includes a top surface of said substrate, a bottom surface of said substrate, and side surfaces of said through-holes;
a first layer of magnetic material provided on said substrate in said coil winding area;
a first layer of electrically conductive material forming at least one coil winding provided on said substrate in said coil winding area; and
a second layer of magnetic material formed over said first layer of electrically conductive material, said second layer of magnetic material being connected with said first layer of magnetic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. A method for fabricating a microtransformer comprising the steps of:
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providing a substrate with at least a first and second through-holes that define between them a coil winding area that includes a top surface of said substrate, a bottom surface of said substrate, and side surfaces of said through-holes;
forming a first layer of magnetic material on said substrate in said coil winding area;
forming a first layer of electrically conductive material forming at least one coil winding on said substrate in said coil winding area; and
forming a second layer of magnetic material over said first layer of electrically conductive material, said second layer of magnetic material being connected with said first layer of magnetic material. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63)
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64. A system-on-chip comprising:
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a substrate having a through-hole microtransformer formed thereon, wherein said through-holes microtransformer is formed in a coil winding area defined by first and second through-holes in said substrate, said coil winding area including a top surface of said substrate, a bottom surface of said substrate, and side surfaces of said through-holes, said microtransformer further comprising a first layer of magnetic material provided on said substrate in said coil winding area, a first layer of electrically conductive material forming at least one coil winding provided on said substrate in said coil winding area, and a second layer of magnetic material formed over said first layer of electrically conductive material, said second layer of magnetic material being connected with said first layer of magnetic material; and
at least one integrated circuit chip attached to said substrate and electrically connected to said substrate. - View Dependent Claims (65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86. A processor-based system, comprising:
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a processor; and
an integrated circuit coupled to said processor, said integrated circuit including a through-hole microtransformer, said microtransformer being formed in a coil winding area defined by a first and second through-holes in a substrate, said coil winding area including a top surface of said substrate, a bottom surface of said substrate, and side surfaces of said through-holes, said microtransformer further comprising a first layer of magnetic material provided on said substrate in said coil winding area, a first layer of electrically conductive material forming at least one coil winding provided on said substrate in said coil winding area, and a second layer of magnetic material connected with said first layer of magnetic material. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103)
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Specification