Method of producing a thin film battery anode
First Claim
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1. A method of producing a battery cell anode comprising steps of:
- (a) providing a Li3Sn material;
(b) depositing the Li3Sn material in an argon-nitrogen atmosphere to form a Sn;
Li3N anode, the nitrogen being limited to between 0.5% and 15% of the total volume of the argon-nitrogen atmosphere.
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Abstract
A method of producing a battery cell anode is described wherein the manufacturing process of the anode commences with a sputtering target with a composition of Li3Sn. The target is sputtered in an argon-nitrogen (Ar—N2) gas mixture, wherein the nitrogen gas is limited to within a range of 0.5%-15% of the total volume of gas. The sputtering of the target produces a Sn:Li3N anode layer.
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5 Claims
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1. A method of producing a battery cell anode comprising steps of:
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(a) providing a Li3Sn material;
(b) depositing the Li3Sn material in an argon-nitrogen atmosphere to form a Sn;
Li3N anode, the nitrogen being limited to between 0.5% and 15% of the total volume of the argon-nitrogen atmosphere.
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2. A method of producing a battery cell anode comprising the steps of:
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(a) providing a Li3Sn sputtering target;
(b) sputtering the Li3Sn target in an argon-nitrogen atmosphere to form an anode, the nitrogen being limited to between 0.5% and 15% of the total volume of the argon-nitrogen atmosphere. - View Dependent Claims (3, 4)
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5. A method of producing a battery cell anode comprising the steps of:
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(a) providing a sputtering target having lithium combined with zinc;
(b) sputtering the target in an argon-nitrogen atmosphere to form an anode having zinc within a lithium-nitrogen matrix wherein the formed anode is Zn;
Li3N, the nitrogen being limited to between 0.5% and 15% of the total volume of the argon-nitrogen atmosphere.
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Specification