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Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

  • US 6,423,564 B1
  • Filed: 10/30/2000
  • Issued: 07/23/2002
  • Est. Priority Date: 08/14/1997
  • Status: Expired due to Fees
First Claim
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1. A method of forming a force-sensing transducer comprising:

  • providing a substrate having a force sensing element defining an area over and within which a conductive layer of material is to be formed;

    forming a patterned adhesion layer over less than an entirety of the area; and

    forming a conductive layer of material over the area, the conductive layer of material being bonded to the substrate through the patterned adhesion layer in a bonding relationship, wherein the area of bonding is less than the area of said conductive layer.

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