Multi-directional radiation coupling in quantum-well infrared photodetectors

• US 6,423,980 B1
• Filed: 06/26/2000
• Issued: 07/23/2002
• Est. Priority Date: 06/25/1999
• Status: Expired due to Fees

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Wilson, Daniel W., Liu, John K., Bandara, Sumith V., Gunapala, Sarath D.
• Primary Examiner(s): CRANE, SARA W
• Application Number:
  US09/575,678
• Time in Patent Office: 757 Days
• Field of Search: 257/21, 257/436, 257/460, 250/338.4, 359/562, 359/563, 359/572, 359/575, 438/32
• US Class Current: 257/21
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 31/02327 the optical elements being integrated or being directly associated to the device, e.g. back reflectors optical coatings H01L31/0216
• CPC Class Codes: H01L 31/035236 Superlattices; Multiple quantum well structures
• CPC Class Codes: H01L 31/101 Devices sensitive to infrared, visible or ultraviolet radiation
• CPC Class Codes: Y10S 977/759 Quantum well dimensioned for intersubband transitions, e.g. for use in unipolar light emitters or quantum well infrared photodetectors
• CPC Class Codes: Y10S 977/789 in array format

Abstract

Techniques for coupling radiation into a quantum-well detector by using a two-dimensional array of grating cells to form at least three different grating directions to provide efficient coupling.

Claims

1. A device, comprising:

a detector layer having multiple quantum-well layers and responsive to radiation with a polarization component substantially parallel to said quantum-well layers; and

a grating layer formed over said detector layer to have a two-dimensional array of grating unit cells and to diffract an input beam into at least one diffraction direction not perpendicular to said quantum-well layers, each unit cell shaped to define at least three different grating directions within said grating layer,

wherein each unit cell includes a central region and a peripheral region conforming to and surrounding said central region,

wherein central region and said peripheral region have different characteristics to effectuate a phase difference between a light ray reflected from said peripheral region and another light ray reflected from said central region.

2. The device as in claim 1, wherein said central and said peripheral regions have different thicknesses.

3. The device as in claim 2, wherein said central region and said peripheral region have a thickness difference substantially equal to one quarter of one wavelength of said input beam.

4. The device as in claim 2, wherein said central and said peripheral regions of each cell are configured to reflect about the same amount of optical power.

5. The device as in claim 2, wherein said central region has an area substantially equal to an area of said peripheral region.

6. The device as in claim 1, wherein each unit cell is shaped as a hexagon to have three pairs of parallel and opposing sides which are perpendicular to said three grating directions, respectively.

7. The device as in claim 1, wherein each unit cell is a polygon with an even number of sides greater than six.

8. The device as in claim 1, further comprising:

a reflective layer directly formed over said grating layer; and

a transparent layer formed on one side of said detector layer opposing an opposite side that has said grating layer.

9. The device as in claim 8, wherein both of said reflective layer and said transparent layer are electrically conductive to couple an electric bias to said detector layer.

20. The device as in claim 1, wherein said multiple quantum-well layers include GaAs.

10. A device, comprising:

at least one quantum-well detector formed of quantum-well layers; and

a grating layer formed over a first side of said detector to have a two-dimensional array of grating cells to diffract an input beam into a least one diffraction direction not perpendicular to said quantum-well layers, each cell being a polygon with at least three pairs of parallel and opposing sides to define at least three different grating directions.

11. The device as in claim 10, wherein each grating cell is a polygon with at least six sides and includes a central region and a peripheral region conforming to and surrounding said central region, wherein central region and said peripheral region have different characteristics to effectuate a phase difference of about 180 degrees between a light ray reflected from said peripheral region and another light ray reflected from said region.

12. The device as in claim 10, wherein said detector has a dimension along said quantum-well layers greater than a total thickness of said quantum well layers so that a reflected beam along said diffraction direction is reflected by both sides of said quantum well layers said detector at least once to transverse said quantum well layers at least twice.

13. The device as in claim 10, wherein said grating layer is formed of a doped semiconductor to provide an electrical potential to said detector.

14. The device as in claim 13, further comprising a transparent contact layer on a side of said quantum well layers opposing said layer, wherein said contact layer is formed of a doped semiconductor.

15. The device as in claim 10, wherein each grating cell is a hexagon cell with equal six sides.

21. The device as in claim 10, wherein said multiple quantum-well layers include GaAs.

16. A device, comprising a grating layer having a two-dimensional array of grating cells, each cell being a polygon with at least three pairs of parallel and opposing sides to define at least three different grating directions, wherein each grating cell includes a central region and a peripheral region conforming to and surrounding said central region, which have a difference in their optical thickness values about one quarter of a selected radiation wavelength.

17. The device as in claim 16, wherein said central region has an index of refraction different from an index of refraction of said peripheral region.

18. The device as in claim 16, wherein said central and said peripheral regions of each cell are configured to reflect about the same amount of optical power.

19. A method, comprising:

preparing a substrate;

forming a first contact layer over said substrate;

forming a detector layer over said first contact layer to include a plurality of quantum-well layers;

forming a second contact layer over said detector layer;

patterning said second contact layer to form a periodic array of polygon cells to define at least three grating directions, each cell having a central region and a peripheral region with different characteristics to cause different phase delays in reflecting input light rays; and

removing said substrate from a structure which includes said first contact layer, said detector layer, and said patterned second contact layer.